Inventor · disambiguated record
Masami Hayashida
Also filed as: HAYASHIDA MASAMI
10 granted patents·441 citations·filing 1990–1996
92Inventor score
Files withCANON KK10
Top patents by PatentIndex Score
10 records- 0192US5390228AMethod of and apparatus for stabilizing shapes of objects, such as optical elements, as well as exposure apparatus using same and method of manufacturing semiconductor devicesCANON KK·Filed 1994·Granted Feb 14, 1995·90 cites·21 claims
- 0291US5052033AReflection type maskCANON KK·Filed 1990·Granted Sep 24, 1991·75 cites·30 claims
- 0382US5641593ALithographic mask and exposure apparatus using the sameCANON KK·Filed 1996·Granted Jun 24, 1997·106 cites·15 claims
- 0480US5204887AX-ray microscopeCANON KK·Filed 1992·Granted Apr 20, 1993·49 cites·47 claims
- 0578US5848119AIllumination system and exposure apparatus having the sameCANON KK·Filed 1996·Granted Dec 8, 1998·43 cites·9 claims
- 0672US5461657AX-ray mirror, and x-ray exposure apparatus and device manufacturing method employing the sameCANON KK·Filed 1994·Granted Oct 24, 1995·24 cites·12 claims
- 0766US5549994AExposure apparatus and reflection type mask to be used in the sameCANON KK·Filed 1995·Granted Aug 27, 1996·25 cites·10 claims
- 0858US5444753AX-ray lithography mask, light exposure apparatus and process thereforeCANON KK·Filed 1994·Granted Aug 22, 1995·14 cites·17 claims
- 0956US5335259AX-ray exposure apparatusCANON KK·Filed 1993·Granted Aug 2, 1994·13 cites·16 claims
- 1030US5145649AApparatus for cleaning an optical element for use with a radiation beamCANON KK·Filed 1990·Granted Sep 8, 1992·2 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →