Inventor · disambiguated record
Makoto Kashibe
Also filed as: KASHIBE MAKOTO
4 granted patents·2 pending applications·3 citations·filing 2002–2023
60Inventor score
Files withHITACHI HIGH TECH CORP6
Top patents by PatentIndex Score
6 records- 0153US2025231543A1Manufacturing apparatus and operating method of manufacturing apparatusHITACHI HIGH TECH CORP·Filed 2023·Application pending·0 cites
- 0248US7125730B2Power supply, a semiconductor making apparatus and a semiconductor wafer fabricating method using the sameHITACHI HIGH TECH CORP·Filed 2003·Granted Oct 24, 2006·1 cites·3 claims
- 0348US7025895B2Plasma processing apparatus and methodHITACHI HIGH TECH CORP·Filed 2002·Granted Apr 11, 2006·2 cites·12 claims
- 0441US2022367156A1Plasma processing apparatus and plasma processing methodHITACHI HIGH TECH CORP·Filed 2020·Application pending·0 cites
- 0540US6713885B2Power supply, a semiconductor making apparatus and a semiconductor wafer fabricating method using the sameHITACHI HIGH TECH CORP·Filed 2002·Granted Mar 30, 2004·0 cites·8 claims
- 0639US11232932B2Plasma processing apparatus and plasma processing methodHITACHI HIGH TECH CORP·Filed 2018·Granted Jan 25, 2022·0 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →