Inventor · disambiguated record
Makiko Katano
Also filed as: KATANO MAKIKO
7 granted patents·7 pending applications·52 citations·filing 1998–2016
81Inventor score
Top patents by PatentIndex Score
14 records- 0184US8119020B2Method for manufacturing electronic deviceITO SHOKO·Filed 2007·Granted Feb 21, 2012·10 cites·18 claims
- 0265US6284020B1Method of maintaining cleanliness of substrates and box for accommodating substratesTOSHIBA KK·Filed 1998·Granted Sep 4, 2001·32 cites·16 claims
- 0361US8771535B2Sample contamination methodYAMADA YUJI·Filed 2011·Granted Jul 8, 2014·2 cites·13 claims
- 0456US7232763B2Method of manufacturing semiconductor deviceTOSHIBA KK·Filed 2004·Granted Jun 19, 2007·5 cites·18 claims
- 0555US8932954B2Impurity analysis device and methodYAMADA YUJI·Filed 2012·Granted Jan 13, 2015·1 cites·18 claims
- 0645US9734985B2Analytical apparatus, sample holder and analytical methodTOSHIBA KK·Filed 2016·Granted Aug 15, 2017·0 cites·14 claims
- 0744US7889313B2Immersion lithography apparatus and exposure methodTOSHIBA KK·Filed 2007·Granted Feb 15, 2011·2 cites·6 claims
- 0842US2007268467A1Exposure apparatus and semiconductor device manufacturing methodKATANO MAKIKO·Filed 2007·Application pending·0 cites
- 0941US2007274814A1Local clean robot-transport plant and robot-transport manufacturing methodKAWASAKI ATSUKO·Filed 2007·Application pending·0 cites
- 1036US2005169806A1Air impurity measurement apparatus and methodFiled 2004·Application pending·0 cites
- 1132US2011053058A1Semiconductor device fabrication mask and method of manufacturing the sameOTSUBO KYO·Filed 2010·Application pending·0 cites
- 1230US2011100393A1Method of cleaning mask and mask cleaning apparatusUEMURA ERI·Filed 2010·Application pending·0 cites
- 1329US2011203611A1Mask cleaning method, mask cleaning apparatus, and pellicleUEMURA ERI·Filed 2010·Application pending·0 cites
- 1425US2014230522A1Cleanliness measuring carriage and cleanliness measuring systemTOKSHIBA KK·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →