Inventor · disambiguated record
Masaki Kitabata
Also filed as: KITABATA MASAKI
0 granted patents·4 pending applications·0 citations·filing 2005–2009
Top patents by PatentIndex Score
4 records- 0152US2009026172A1Dry etching method and dry etching apparatusKITABATA MASAKI·Filed 2008·Application pending·0 cites
- 0249US2010078043A1Cleaning device and cleaning methodKITABATA MASAKI·Filed 2009·Application pending·0 cites
- 0341US2005276908A1Thin film coating device, thin film coating method, immersion exposure device, and immersion exposure methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2005·Application pending·0 cites
- 0417US2008314316A1Monitoring system and monitoring method for substrate production apparatusKITABATA MASAKI·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →