Inventor · disambiguated record
Mathias Koch
Also filed as: KOCH MATHIAS
3 granted patents·1 pending application·65 citations·filing 2002–2004
74Inventor score
Technology areasH10P
Files withAXCELIS TECH INC3
Top patents by PatentIndex Score
4 records- 0182US6695886B1Optical path improvement, focus length change compensation, and stray light reduction for temperature measurement system of RTP toolAXCELIS TECH INC·Filed 2002·Granted Feb 24, 2004·31 cites·27 claims
- 0277US6783630B2Segmented cold plate for rapid thermal processing (RTP) tool for conduction coolingAXCELIS TECH INC·Filed 2002·Granted Aug 31, 2004·22 cites·62 claims
- 0368US7166187B2Segmented cold plate for rapid thermal processing (RTP) tool for conduction coolingAXCELIS TECH INC·Filed 2004·Granted Jan 23, 2007·12 cites·7 claims
- 0432US2004053514A1Apparatus for cooling a substrate through thermal conduction in the viscous regimeFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →