Inventor · disambiguated record
Mark E. Lagus
Also filed as: LAGUS MARK E
5 granted patents·259 citations·filing 1997–2008
83Inventor score
Top patents by PatentIndex Score
5 records- 0193US5965309AFocus or exposure dose parameter control system using tone reversing patternsIBM·Filed 1997·Granted Oct 12, 1999·116 cites·10 claims
- 0290US6004706AEtching parameter control system processIBM·Filed 1999·Granted Dec 21, 1999·86 cites·10 claims
- 0374US5969273AMethod and apparatus for critical dimension and tool resolution determination using edge widthIBM·Filed 1998·Granted Oct 19, 1999·51 cites·19 claims
- 0457US8340800B2Monitoring a process sector in a production facilityCOTE WILLIAM·Filed 2008·Granted Dec 25, 2012·4 cites·19 claims
- 0545US6656369B2Method for fabricating a scanning probe microscope probeIBM·Filed 2002·Granted Dec 2, 2003·2 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →