Inventor · disambiguated record
Margaret J. Lawson
Also filed as: LAWSON MARGARET J · LAWSON MARGARET JANE
4 granted patents·155 citations·filing 1991–1995
76Inventor score
Technology areasH10P
Files withIBM4
Top patents by PatentIndex Score
4 records- 0188US5240878AMethod for forming patterned films on a substrateIBM·Filed 1991·Granted Aug 31, 1993·139 cites·4 claims
- 0237US5209815AMethod for forming patterned films on a substrateIBM·Filed 1991·Granted May 11, 1993·11 cites·18 claims
- 0327US5454390AVapor rinse-vapor dry process toolIBM·Filed 1994·Granted Oct 3, 1995·4 cites·1 claims
- 0425US5682913AVapor rinse-vapor dry processing toolIBM·Filed 1995·Granted Nov 4, 1997·1 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →