Inventor · disambiguated record
Matthias Liertzer
Also filed as: LIERTZER MATTHIAS
0 granted patents·3 pending applications·0 citations·filing 2023–2024
Technology areasH01J
Files withIMS NANOFABRICATION GMBH3
Top patents by PatentIndex Score
3 records- 0159US2024304415A1Method for Determining Focal Properties in a Target Beam Field of a Multi-Beam Charged-Particle Processing ApparatusIMS NANOFABRICATION GMBH·Filed 2024·Application pending·0 cites
- 0257US2023296989A1Correction of Thermal Expansion in a Lithographic DeviceIMS NANOFABRICATION GMBH·Filed 2023·Application pending·0 cites
- 0354US2023360880A1Multi-Beam Pattern Definition DeviceIMS NANOFABRICATION GMBH·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →