Inventor · disambiguated record
Matti Liukku
Also filed as: LIUKKU MATTI
26 granted patents·9 pending applications·23 citations·filing 2014–2025
92Inventor score
Files withMURATA MANUFACTURING CO35
Top patents by PatentIndex Score
35 records- 0191US12262176B2TransducerMURATA MANUFACTURING CO·Filed 2023·Granted Mar 25, 2025·2 cites·21 claims
- 0290US11979713B2Piezoelectric deviceMURATA MANUFACTURING CO·Filed 2022·Granted May 7, 2024·2 cites·20 claims
- 0389US11796560B2MEMS accelerometer with mechanically decoupled proof massMURATA MANUFACTURING CO·Filed 2021·Granted Oct 24, 2023·2 cites·11 claims
- 0489US9547020B2Capacitive micromechanical sensor structure and micromechanical accelerometerMURATA MANUFACTURING CO·Filed 2014·Granted Jan 17, 2017·9 cites·18 claims
- 0585US11296671B2MEMS frequency-tuning springsMURATA MANUFACTURING CO·Filed 2019·Granted Apr 5, 2022·3 cites·8 claims
- 0675US10969575B2MEMS reflector with center supportMURATA MANUFACTURING CO·Filed 2018·Granted Apr 6, 2021·2 cites·14 claims
- 0771US9575088B2Capacitive micromechanical acceleration sensorMURATA MANUFACTURING CO·Filed 2014·Granted Feb 21, 2017·2 cites·33 claims
- 0871US2025388457A1Mems device with motion limiterMURATA MANUFACTURING CO·Filed 2025·Application pending·0 cites
- 0967US10914939B2MEMS reflector systemMURATA MANUFACTURING CO·Filed 2018·Granted Feb 9, 2021·1 cites·9 claims
- 1066US2025313453A1Electrostatic actuatorMURATA MANUFACTURING CO·Filed 2025·Application pending·0 cites
- 1164US12428291B2In-plane and out-of-plane accelerometerMURATA MANUFACTURING CO·Filed 2024·Granted Sep 30, 2025·0 cites·20 claims
- 1263US2025138044A1Comb structure for mems accelerometerMURATA MANUFACTURING CO·Filed 2024·Application pending·0 cites
- 1361US2025206595A1Mems deviceMURATA MANUFACTURING CO·Filed 2024·Application pending·0 cites
- 1460US2024295582A1Capacitive mems deviceMURATA MANUFACTURING CO·Filed 2024·Application pending·0 cites
- 1559US12507594B2Piezoelectric deviceMURATA MANUFACTURING CO·Filed 2022·Granted Dec 23, 2025·0 cites·20 claims
- 1659US2024345382A1Two-axis mems mirrorMURATA MANUFACTURING CO·Filed 2024·Application pending·0 cites
- 1759US2024190698A1Stopper bump on rotorMURATA MANUFACTURING CO·Filed 2023·Application pending·0 cites
- 1858US12474366B2Three-axis accelerometer with two massesMURATA MANUFACTURING CO·Filed 2023·Granted Nov 18, 2025·0 cites·20 claims
- 1957US11867714B2Accelerometer with two seesawsMURATA MANUFACTURING CO·Filed 2022·Granted Jan 9, 2024·0 cites·15 claims
- 2057US2024286890A1Double layer mems devicesMURATA MANUFACTURING CO·Filed 2024·Application pending·0 cites
- 2156US11977094B2Seesaw accelerometerMURATA MANUFACTURING CO·Filed 2022·Granted May 7, 2024·0 cites·13 claims
- 2256US11526000B2Two-axis MEMS mirror with separated drivesMURATA MANUFACTURING CO·Filed 2020·Granted Dec 13, 2022·0 cites·17 claims
- 2352US11467181B2Low-noise multi-axis MEMS accelerometerMURATA MANUFACTURING CO·Filed 2020·Granted Oct 11, 2022·0 cites·13 claims
- 2451US2023305036A1Accelerometer element for detecting out-of-plane accelerationsMURATA MANUFACTURING CO·Filed 2023·Application pending·0 cites
- 2548US11105828B2Microelectromechanical device for out-of-plane motion detectionMURATA MANUFACTURING CO·Filed 2019·Granted Aug 31, 2021·0 cites·20 claims
- 2648US10809279B2Capacitive microelectromechanical accelerometerMURATA MANUFACTURING CO·Filed 2018·Granted Oct 20, 2020·0 cites·14 claims
- 2747US9764942B2Multi-level micromechanical structureMURATA MANUFACTURING CO·Filed 2016·Granted Sep 19, 2017·0 cites·6 claims
- 2846US11820648B2Vibration damping in MEMS acceleration sensorsMURATA MANUFACTURING CO·Filed 2019·Granted Nov 21, 2023·0 cites·5 claims
- 2946US10823568B2Capacitive microelectromechanical accelerometerMURATA MANUFACTURING CO·Filed 2018·Granted Nov 3, 2020·0 cites·10 claims
- 3044US11131688B2Robust z-axis acceleration sensorMURATA MANUFACTURING CO·Filed 2020·Granted Sep 28, 2021·0 cites·5 claims
- 3144US11067793B2Mems reflector system with trajectory controlMURATA MANUFACTURING CO·Filed 2019·Granted Jul 20, 2021·0 cites·8 claims
- 3243US11002957B2Scanning optical device with broadened image areaMURATA MANUFACTURING CO·Filed 2019·Granted May 11, 2021·0 cites·19 claims
- 3337US10137851B2MEMS sensor and a semiconductor packageMURATA MANUFACTURING CO·Filed 2015·Granted Nov 27, 2018·0 cites·20 claims
- 3434US9969606B2Microelectromechanical structure and deviceMURATA MANUFACTURING CO·Filed 2016·Granted May 15, 2018·0 cites·22 claims
- 3532US10281486B2Microelectromechanical accelerometer deviceMURATA MANUFACTURING CO·Filed 2016·Granted May 7, 2019·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →