Inventor · disambiguated record
Markus Lutz
Also filed as: LUTZ MARKUS · LUTZ MARKUS RUDOLF
149 granted patents·17 pending applications·4,068 citations·filing 1995–2025
99Inventor score
Top patents by PatentIndex Score
166 records- 0199US6995622B2Frequency and/or phase compensated microelectromechanical oscillatorBOSCH GMBH ROBERT·Filed 2004·Granted Feb 7, 2006·157 cites·93 claims
- 0298US11370656B2Stacked-die MEMS resonatorSITIME CORP·Filed 2021·Granted Jun 28, 2022·4 cites·24 claims
- 0398US10913655B2Manufacturing of integrated circuit resonatorSITIME CORP·Filed 2020·Granted Feb 9, 2021·4 cites·26 claims
- 0498US7446620B2Microelectromechanical oscillator having temperature measurement system, and method of operating sameSITIME CORP·Filed 2006·Granted Nov 4, 2008·46 cites·25 claims
- 0598US7369004B2Microelectromechanical oscillator and method of operating sameSITIME CORP·Filed 2006·Granted May 6, 2008·38 cites·30 claims
- 0698US7202761B2Temperature compensation for silicon MEMS resonatorBOSCH GMBH ROBERT·Filed 2006·Granted Apr 10, 2007·82 cites·23 claims
- 0798US6936491B2Method of fabricating microelectromechanical systems and devices having trench isolated contactsBOSCH GMBH ROBERT·Filed 2003·Granted Aug 30, 2005·167 cites·27 claims
- 0897US11987495B2MEMS resonator systemSITIME CORP·Filed 2023·Granted May 21, 2024·1 cites·20 claims
- 0997US8941247B1Stacked die package for MEMS resonator systemSITIME CORP·Filed 2014·Granted Jan 27, 2015·16 cites·20 claims
- 1097US7449355B2Anti-stiction technique for electromechanical systems and electromechanical device employing sameBOSCH GMBH ROBERT·Filed 2005·Granted Nov 11, 2008·57 cites·36 claims
- 1197US7227432B2MEMS resonator array structure and method of operating and using sameBOSCH GMBH ROBERT·Filed 2005·Granted Jun 5, 2007·61 cites·35 claims
- 1297US7071793B2Temperature compensation for silicon MEMS resonatorBOSCH GMBH ROBERT·Filed 2005·Granted Jul 4, 2006·43 cites·19 claims
- 1397US5604312ARate-of-rotation sensorBOSCH GMBH ROBERT·Filed 1995·Granted Feb 18, 1997·154 cites·6 claims
- 1496US10476477B1Dual-resonator semiconductor dieSITIME CORP·Filed 2017·Granted Nov 12, 2019·8 cites·20 claims
- 1596US9821998B2Stacked-die MEMS resonator systemSITIME CORP·Filed 2016·Granted Nov 21, 2017·9 cites·18 claims
- 1696US9371221B2Low-profile stacked-die MEMS resonator systemSITIME CORP·Filed 2015·Granted Jun 21, 2016·11 cites·21 claims
- 1796US8916407B1MEMS device and method of manufacturing sameSITIME CORP·Filed 2013·Granted Dec 23, 2014·16 cites·20 claims
- 1896US7224236B2Frequency and/or phase compensated microelectromechanical oscillatorBOSCH GMBH ROBERT·Filed 2005·Granted May 29, 2007·20 cites·65 claims
- 1996US7221230B2Frequency and/or phase compensated microelectromechanical oscillatorBOSCH GMBH ROBERT·Filed 2005·Granted May 22, 2007·24 cites·49 claims
- 2096US7074637B2Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systemsBOSCH GMBH ROBERT·Filed 2005·Granted Jul 11, 2006·33 cites·35 claims
- 2196US6987432B2Temperature compensation for silicon MEMS resonatorBOSCH GMBH ROBERT·Filed 2003·Granted Jan 17, 2006·116 cites·25 claims
- 2296US6930367B2Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systemsBOSCH GMBH ROBERT·Filed 2003·Granted Aug 16, 2005·90 cites·28 claims
- 2395US10287162B2Low-profile stacked-die MEMS resonator systemSITIME CORP·Filed 2017·Granted May 14, 2019·6 cites·20 claims
- 2495US8669664B2Stacked die package for MEMS resonator systemSITIME CORP·Filed 2012·Granted Mar 11, 2014·12 cites·20 claims
- 2595US7456042B2Microelectromechanical systems having stored charge and methods for fabricating and using sameBOSCH GMBH ROBERT·Filed 2006·Granted Nov 25, 2008·35 cites·37 claims
- 2695US7323952B2Breath-mode ring resonator structure, and method of designing, operating and using sameBOSCH GMBH ROBERT·Filed 2005·Granted Jan 29, 2008·40 cites·18 claims
- 2795US7268646B2Temperature controlled MEMS resonator and method for controlling resonator frequencyBOSCH GMBH ROBERT·Filed 2005·Granted Sep 11, 2007·30 cites·53 claims
- 2895US7221033B2Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systemsBOSCH GMBH ROBERT·Filed 2005·Granted May 22, 2007·25 cites·28 claims
- 2995US7205867B2Microelectromechanical resonator structure, and method of designing, operating and using sameBOSCH GMBH ROBERT·Filed 2005·Granted Apr 17, 2007·35 cites·35 claims
- 3095US7075160B2Microelectromechanical systems and devices having thin film encapsulated mechanical structuresBOSCH GMBH ROBERT·Filed 2003·Granted Jul 11, 2006·65 cites·43 claims
- 3195US6928879B2Episeal pressure sensor and method for making an episeal pressure sensorBOSCH GMBH ROBERT·Filed 2003·Granted Aug 16, 2005·81 cites·68 claims
- 3295US6521965B1Integrated pressure sensorBOSCH GMBH ROBERT·Filed 2000·Granted Feb 18, 2003·62 cites·16 claims
- 3395US5728936ARotary speed sensorBOSCH GMBH ROBERT·Filed 1996·Granted Mar 17, 1998·241 cites·11 claims
- 3495US5723353AProcess for manufacturing a sensorBOSCH GMBH ROBERT·Filed 1996·Granted Mar 3, 1998·106 cites·11 claims
- 3594US11708264B2Stacked-die MEMS resonatorSITIME CORP·Filed 2022·Granted Jul 25, 2023·1 cites·20 claims
- 3694US8871551B2Wafer encapsulated microelectromechanical structure and method of manufacturing samePARTRIDGE AARON·Filed 2006·Granted Oct 28, 2014·20 cites·24 claims
- 3794US8324729B2Stacked die package for MEMS resonator systemGUPTA PAVAN·Filed 2011·Granted Dec 4, 2012·19 cites·20 claims
- 3894US7532081B2Frequency and/or phase compensated microelectromechanical oscillatorBOSCH GMBH ROBERT·Filed 2007·Granted May 12, 2009·18 cites·20 claims
- 3994US7446619B2Temperature measurement system having a plurality of microelectromechanical resonators and method of operating sameSITIME CORP·Filed 2006·Granted Nov 4, 2008·31 cites·25 claims
- 4094US7427905B2Temperature controlled MEMS resonator and method for controlling resonator frequencyBOSCH GMBH ROBERT·Filed 2007·Granted Sep 23, 2008·27 cites·23 claims
- 4194US7102467B2Method for adjusting the frequency of a MEMS resonatorBOSCH GMBH ROBERT·Filed 2004·Granted Sep 5, 2006·64 cites·60 claims
- 4294US6762072B2SI wafer-cap wafer bonding method using local laser energy, device produced by the method, and system used in the methodBOSCH GMBH ROBERT·Filed 2002·Granted Jul 13, 2004·74 cites·18 claims
- 4393US10723617B2Package structure for micromechanical resonatorSITIME CORP·Filed 2019·Granted Jul 28, 2020·4 cites·21 claims
- 4493US9774313B1Laterally-doped MEMS resonatorSITIME CORP·Filed 2014·Granted Sep 26, 2017·9 cites·10 claims
- 4593US7352040B2Microelectromechanical systems having trench isolated contacts, and methods for fabricating sameBOSCH GMBH ROBERT·Filed 2005·Granted Apr 1, 2008·28 cites·21 claims
- 4693US7221241B2Method for adjusting the frequency of a MEMS resonatorBOSCH GMBH ROBERT·Filed 2006·Granted May 22, 2007·25 cites·47 claims
- 4793US6106735AWafer stack and method of producing sensorsBOSCH GMBH ROBERT·Filed 1998·Granted Aug 22, 2000·102 cites·12 claims
- 4892US11218984B1Fixed-beacon time transfer systemSITIME CORP·Filed 2019·Granted Jan 4, 2022·6 cites·18 claims
- 4992US7907027B2Frequency and/or phase compensated microelectromechanical oscillatorBOSCH GMBH ROBERT·Filed 2009·Granted Mar 15, 2011·14 cites·24 claims
- 5092US7288824B2Microelectromechanical systems, and devices having thin film encapsulated mechanical structuresBOSCH GMBH ROBERT·Filed 2005·Granted Oct 30, 2007·15 cites·4 claims
Showing the top 50 of 166 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →