Inventor · disambiguated record
Matthias Metz
Also filed as: METZ MATTHIAS
12 granted patents·326 citations·filing 1998–2013
93Inventor score
Top patents by PatentIndex Score
12 records- 0197US7449355B2Anti-stiction technique for electromechanical systems and electromechanical device employing sameBOSCH GMBH ROBERT·Filed 2005·Granted Nov 11, 2008·57 cites·36 claims
- 0292US9003885B2Tri-axis accelerometer having a single proof mass and fully differential output signalsPAN ZHIYU·Filed 2013·Granted Apr 14, 2015·9 cites·23 claims
- 0392US7414351B2Energy harvesting device manufactured by print forming processesBOSCH GMBH ROBERT·Filed 2006·Granted Aug 19, 2008·26 cites·16 claims
- 0491US8020266B2Method of producing a deviceBOSCH GMBH ROBERT·Filed 2008·Granted Sep 20, 2011·23 cites·4 claims
- 0591US6288533B1Method and apparatus for detecting rotor position by use of magnetic field sensor pairsPHYSICAL ELECTRONICS LAB·Filed 1998·Granted Sep 11, 2001·154 cites·15 claims
- 0688US7757555B2Tri-axis accelerometer having a single proof mass and fully differential output signalsBOSCH GMBH ROBERT·Filed 2006·Granted Jul 20, 2010·14 cites·10 claims
- 0784US7671515B2Microelectromechanical devices and fabrication methodsBOSCH GMBH ROBERT·Filed 2006·Granted Mar 2, 2010·13 cites·6 claims
- 0882US8418559B2Tri-axis accelerometer having a single proof mass and fully differential output signalsPAN ZHIYU·Filed 2010·Granted Apr 16, 2013·4 cites·14 claims
- 0980US7898046B2Microelectromechanical systems encapsulation processBOSCH GMBH ROBERT·Filed 2009·Granted Mar 1, 2011·5 cites·6 claims
- 1080US7582514B2Microelectromechanical systems encapsulation process with anti-stiction coatingBOSCH GMBH ROBERT·Filed 2007·Granted Sep 1, 2009·9 cites·27 claims
- 1179US7625773B2Anti-stiction technique for electromechanical systems and electromechanical device employing sameBOSCH GMBH ROBERT·Filed 2008·Granted Dec 1, 2009·7 cites·43 claims
- 1279US7563633B2Microelectromechanical systems encapsulation processBOSCH GMBH ROBERT·Filed 2006·Granted Jul 21, 2009·5 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →