Inventor · disambiguated record
Masahiro Mimasaka
Also filed as: MIMASAKA MASAHIRO
7 granted patents·318 citations·filing 1989–1998
88Inventor score
Files withDAINIPPON SCREEN MFG7
Top patents by PatentIndex Score
7 records- 0193US4998021AMethod of detecting an end point of surface treatmentDAINIPPON SCREEN MFG·Filed 1989·Granted Mar 5, 1991·90 cites·15 claims
- 0292US5984540ADeveloping apparatus and developing methodDAINIPPON SCREEN MFG·Filed 1997·Granted Nov 16, 1999·27 cites·28 claims
- 0390US6089762ADeveloping apparatus, developing method and substrate processing apparatusDAINIPPON SCREEN MFG·Filed 1998·Granted Jul 18, 2000·27 cites·21 claims
- 0486US5989632ACoating solution applying method and apparatusDAINIPPON SCREEN MFG·Filed 1997·Granted Nov 23, 1999·54 cites·18 claims
- 0581US5020200AApparatus for treating a wafer surfaceDAINIPPON SCREEN MFG·Filed 1990·Granted Jun 4, 1991·81 cites·18 claims
- 0665US6076979AMethod of and apparatus for supplying developing solution onto substrateDAINIPPON SCREEN MFG·Filed 1998·Granted Jun 20, 2000·36 cites·16 claims
- 0733US5865893ASpin coating apparatusDAINIPPON SCREEN MFG·Filed 1995·Granted Feb 2, 1999·3 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →