Inventor · disambiguated record
Masahiro Morisada
Also filed as: MORISADA MASAHIRO
14 granted patents·1 pending application·158 citations·filing 1990–2006
92Inventor score
Files withCANON KK15
Top patents by PatentIndex Score
15 records- 0180US5936710AScanning type exposure apparatus, position control apparatus, and method thereforCANON KK·Filed 1996·Granted Aug 10, 1999·39 cites·12 claims
- 0277US7264235B2Active damping apparatus, exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Sep 4, 2007·4 cites·6 claims
- 0377US7069114B2Anti-vibration techniqueCANON KK·Filed 2005·Granted Jun 27, 2006·6 cites·10 claims
- 0476US6903806B2Stage control apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2003·Granted Jun 7, 2005·15 cites·9 claims
- 0573US6937317B2Active damping apparatus, exposure apparatus and device manufacturing methodCANON KK·Filed 2003·Granted Aug 30, 2005·11 cites·14 claims
- 0671US6160612AScanning type exposure apparatus, position control apparatus, and method thereforCANON KK·Filed 1999·Granted Dec 12, 2000·26 cites·16 claims
- 0768US6864962B2Active anti-vibration apparatus and exposure apparatus and device manufacturing method using the sameCANON KK·Filed 2002·Granted Mar 8, 2005·9 cites·10 claims
- 0868US5233586AServo control system for controlling tracking of an optical head on an optical diskCANON KK·Filed 1993·Granted Aug 3, 1993·18 cites·9 claims
- 0967US7119879B2Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing methodCANON KK·Filed 2005·Granted Oct 10, 2006·2 cites·17 claims
- 1066US6975383B2Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing methodCANON KK·Filed 2003·Granted Dec 13, 2005·9 cites·15 claims
- 1150US5612602ADevice and method comprising a motor and/or a digital signal processor, means for supplying signals of a plurality of channels in serial form, or means for causing an actuator to abut an objectCANON KK·Filed 1994·Granted Mar 18, 1997·14 cites·6 claims
- 1250US2006206237A1Anti-vibration techniqueCANON KK·Filed 2006·Application pending·0 cites
- 1345US7024284B2Anti-vibration techniqueCANON KK·Filed 2004·Granted Apr 4, 2006·2 cites·9 claims
- 1442US7342645B2Stage control apparatus and method, stage apparatus and exposure apparatusCANON KK·Filed 2006·Granted Mar 11, 2008·0 cites·18 claims
- 1530US5305193AAdaptive apparatusCANON KK·Filed 1990·Granted Apr 19, 1994·3 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →