Inventor · disambiguated record
Masaichi Murakami
Also filed as: MURAKAMI MASAICHI
12 granted patents·416 citations·filing 1985–2001
93Inventor score
Top patents by PatentIndex Score
12 records- 0191US5486896AExposure apparatusNIKON CORP·Filed 1994·Granted Jan 23, 1996·80 cites·13 claims
- 0287US4860374AApparatus for detecting position of reference patternNIKON CORP·Filed 1988·Granted Aug 22, 1989·109 cites·7 claims
- 0385US4741622AMethod and apparatus for detecting diversionNIPPON KOGAKU KK·Filed 1986·Granted May 3, 1988·40 cites·20 claims
- 0481US4704020AProjection optical apparatusNIPPON KOGAKU KK·Filed 1986·Granted Nov 3, 1987·32 cites·5 claims
- 0579US5920378AProjection exposure apparatusNIKON CORP·Filed 1997·Granted Jul 6, 1999·42 cites·20 claims
- 0679US5912726AProjection exposure apparatus and method having a positional deviation detection system that employs light from an exposure illumination systemNIKON CORP·Filed 1997·Granted Jun 15, 1999·47 cites·31 claims
- 0777US4679942AMethod of aligning a semiconductor substrate and a photomaskNIPPON KOGAKU KK·Filed 1985·Granted Jul 14, 1987·27 cites·11 claims
- 0863US6356341B1Exposure device, beam shape setting device and illuminating area setting deviceNIKON CORP·Filed 1999·Granted Mar 12, 2002·10 cites·7 claims
- 0959US5442418AExposure methodNIKON CORP·Filed 1994·Granted Aug 15, 1995·17 cites·13 claims
- 1051US6873400B2Scanning exposure method and systemNIKON CORP·Filed 2001·Granted Mar 29, 2005·4 cites·24 claims
- 1148US4806987AProjection-exposing apparatusNIKON CORP·Filed 1987·Granted Feb 21, 1989·8 cites·2 claims
- 1229USH1733HExposure methodNIPPON KOGAKU KK·Filed 1995·Granted Jun 2, 1998·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →