Inventor · disambiguated record
Masuhiro Natsuhara
Also filed as: NATSUHARA MASUHIRO
53 granted patents·53 pending applications·1,012 citations·filing 1994–2020
98Inventor score
Files withSUMITOMO ELECTRIC INDUSTRIES88ITAKURA KATSUHIRO5AWAZU TOMOYUKI3NATSUHARA MASUHIRO2ITAKURA KATSUHIRA1
Top patents by PatentIndex Score
106 records- 0199US7090394B2Temperature gauge and ceramic susceptor in which it is utilizedSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Aug 15, 2006·478 cites·16 claims
- 0291US6508884B2Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2000·Granted Jan 21, 2003·48 cites·36 claims
- 0386US7576303B2Wafer holder, and wafer prober provided therewithSUMITOMO ELECTRIC INDUSTRIES·Filed 2007·Granted Aug 18, 2009·11 cites·8 claims
- 0486US6664515B2Circuit pattern of resistance heating elements and substrate-treating apparatus incorporating the patternSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted Dec 16, 2003·38 cites·8 claims
- 0585US7554059B2Heater unit and semiconductor manufacturing apparatus including the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2006·Granted Jun 30, 2009·10 cites·21 claims
- 0685US7425838B2Body for keeping a wafer and wafer prober using the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2006·Granted Sep 16, 2008·10 cites·21 claims
- 0784US5732318AHeater and heating/fixing unit comprising the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 1996·Granted Mar 24, 1998·35 cites·13 claims
- 0882US6392197B2Ceramic heater for toner-fixing units and method for manufacturing the heaterSUMITOMO ELECTRIC INDUSTRIES·Filed 2001·Granted May 21, 2002·21 cites·8 claims
- 0979US6384378B2Ceramic heater for toner-fixing units and method for manufacturing the heaterSUMITOMO ELECTRIC INDUSTRIES·Filed 2001·Granted May 7, 2002·18 cites·9 claims
- 1078US6423400B1Susceptor for semiconductor manufacturing equipment and process for producing the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 1999·Granted Jul 23, 2002·29 cites·14 claims
- 1175US7045045B2Workpiece holder for processing apparatus, and processing apparatus using the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted May 16, 2006·14 cites·38 claims
- 1274US7394043B2Ceramic susceptorSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Jul 1, 2008·4 cites·8 claims
- 1374US7361230B2Substrate processing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted Apr 22, 2008·17 cites·23 claims
- 1474US7341969B2Aluminum nitride sintered bodySUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Mar 11, 2008·3 cites·6 claims
- 1574US7211153B2Ceramic joined body, substrate holding structure and substrate processing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted May 1, 2007·17 cites·22 claims
- 1672US7855569B2Wafer holder for wafer prober and wafer prober equipped with the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Dec 21, 2010·6 cites·44 claims
- 1770US5602720AMounting structure for semiconductor device having low thermal resistanceSUMITOMO ELECTRIC INDUSTRIES·Filed 1994·Granted Feb 11, 1997·42 cites·11 claims
- 1868US10886157B2Wafer holding unitSUMITOMO ELECTRIC INDUSTRIES·Filed 2016·Granted Jan 5, 2021·1 cites·8 claims
- 1968US7177536B2Fluid heating heaterSUMITOMO ELECTRIC INDUSTRIES·Filed 2001·Granted Feb 13, 2007·10 cites·4 claims
- 2068US6671489B2Thermal fixing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2001·Granted Dec 30, 2003·10 cites·18 claims
- 2165US6716304B2Wafer holder for semiconductor manufacturing apparatus, and method of manufacturing the wafer holderSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted Apr 6, 2004·8 cites·20 claims
- 2264US7264699B2Workpiece holder for processing apparatus, and processing apparatus using the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Sep 4, 2007·1 cites·4 claims
- 2363US7279048B2Semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2004·Granted Oct 9, 2007·8 cites·17 claims
- 2463US6770379B2Susceptor for semiconductor manufacturing equipment and process for producing the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted Aug 3, 2004·5 cites·13 claims
- 2563US6428741B2Aluminum nitride sintered body and method of preparing the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2001·Granted Aug 6, 2002·5 cites·11 claims
- 2661US6174614B1Sintered aluminum nitride body and metallized substrate prepared therefromSUMITOMO ELECTRIC INDUSTRIES·Filed 1998·Granted Jan 16, 2001·17 cites·23 claims
- 2760US12033880B2Wafer holding bodySUMITOMO ELECTRIC INDUSTRIES·Filed 2020·Granted Jul 9, 2024·0 cites·20 claims
- 2860US6548787B2Ceramic heaterSUMITOMO ELECTRIC INDUSTRIES·Filed 2001·Granted Apr 15, 2003·11 cites·24 claims
- 2960US6271163B1Aluminum nitride sintered body and method of preparing the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 1999·Granted Aug 7, 2001·22 cites·18 claims
- 3059US7414823B2Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installedSUMITOMO ELECTRIC INDUSTRIES·Filed 2004·Granted Aug 19, 2008·6 cites·16 claims
- 3157US6946625B2Ceramic susceptorSUMITOMO ELECTRIC INDUSTRIES·Filed 2004·Granted Sep 20, 2005·4 cites·8 claims
- 3257US6049064AHeat fixing device for fixing a toner imageSUMITOMO ELECTRIC INDUSTRIES·Filed 1997·Granted Apr 11, 2000·12 cites·18 claims
- 3356US7090423B2Connecting structuresSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Aug 15, 2006·3 cites·18 claims
- 3455US7495460B2Body for keeping a wafer, heater unit and wafer proberSUMITOMO ELECTRIC INDUSTRIES·Filed 2006·Granted Feb 24, 2009·2 cites·10 claims
- 3555US6458444B1Ceramic substrate and polishing method thereofSUMITOMO ELECTRIC INDUSTRIES·Filed 1999·Granted Oct 1, 2002·9 cites·16 claims
- 3655US2009142479A1Method of Manufacturing Semiconductor Device-Fabrication Wafer HolderSUMITOMO ELECTRIC INDUSTRIES·Filed 2009·Application pending·0 cites
- 3754US7806984B2Semiconductor or liquid crystal producing deviceSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Oct 5, 2010·4 cites·9 claims
- 3853US7408131B2Wafer holder and semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2006·Granted Aug 5, 2008·0 cites·7 claims
- 3953US7268321B2Wafer holder and semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Sep 11, 2007·3 cites·9 claims
- 4053US6806443B2Ceramic susceptorSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Oct 19, 2004·3 cites·8 claims
- 4152US6653604B2Heater member for mounting heating object and substrate processing apparatus using the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted Nov 25, 2003·3 cites·19 claims
- 4252US6084221AAluminum nitride heaterSUMITOMO ELECTRIC INDUSTRIES·Filed 1998·Granted Jul 4, 2000·14 cites·24 claims
- 4352US2007133964A1Fluid heating heaterSUMITOMO ELECTRIC INDUSTRIES·Filed 2006·Application pending·0 cites
- 4451US7306858B2Aluminum nitride sintered bodySUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Dec 11, 2007·0 cites·4 claims
- 4551US2008277841A1Ceramic base materialSUMITOMO ELECTRIC INDUSTRIES·Filed 2008·Application pending·0 cites
- 4650US2006201422A1Workpiece Holder for Semiconductor Manufacturing ApparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2006·Application pending·0 cites
- 4750US2008039312A1Ceramic base materialSUMITOMO ELECTRIC INDUSTRIES·Filed 2007·Application pending·0 cites
- 4850US2007062929A1Heating unit and the apparatus having the sameMIKUMO AKIRA·Filed 2006·Application pending·0 cites
- 4949US7999210B2Heating device for manufacturing semiconductorSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Aug 16, 2011·2 cites·8 claims
- 5049US7837798B2Semiconductor processing apparatus with a heat resistant hermetically sealed substrate supportSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Nov 23, 2010·2 cites·9 claims
Showing the top 50 of 106 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →