Inventor · disambiguated record

Masahito Nawata

Also filed as: NAWATA MASAHITO

1 granted patent·68 citations·filing 1996–1996

51Inventor score

Technology areasH10P

Files withUNIV NAGOYA1

Top patents by PatentIndex Score

1 record

0179US5980999AMethod of manufacturing thin film and method for performing precise working by radical control and apparatus for carrying out such methodsUNIV NAGOYA·Filed 1996·Granted Nov 9, 1999·68 cites·8 claims

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Masahito Nawata — Patent Inventor | PatentIndex