Inventor · disambiguated record
Masahiro Nei
Also filed as: NEI MASAHIRO
23 granted patents·10 pending applications·427 citations·filing 1993–2024
96Inventor score
Top patents by PatentIndex Score
33 records- 0198US7589820B2Exposure apparatus and method for producing deviceNIKON CORP·Filed 2006·Granted Sep 15, 2009·49 cites·18 claims
- 0297US7242455B2Exposure apparatus and method for producing deviceNIKON CORP·Filed 2005·Granted Jul 10, 2007·32 cites·61 claims
- 0395US6549271B2Exposure apparatus and methodNIKON CORP·Filed 2002·Granted Apr 15, 2003·58 cites·14 claims
- 0494US6342941B1Exposure apparatus and method preheating a mask before exposing; a conveyance method preheating a mask before exposing; and a device manufacturing system and method manufacturing a device according to the exposure apparatus and methodNIKON CORP·Filed 2000·Granted Jan 29, 2002·62 cites·41 claims
- 0588US5864386AExposure apparatusNIKON CORP·Filed 1997·Granted Jan 26, 1999·68 cites·19 claims
- 0687US6813004B1Exposure method, exposure apparatus and making method of the apparatus, and device and manufacturing method of the deviceNIKON CORP·Filed 2000·Granted Nov 2, 2004·37 cites·51 claims
- 0787US5329336AExposure method and apparatusNIKON CORP·Filed 1993·Granted Jul 12, 1994·57 cites·14 claims
- 0886US11854288B2Image determining device to determine the state of a subjectNIKON CORP·Filed 2021·Granted Dec 26, 2023·1 cites·11 claims
- 0985US9019467B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted Apr 28, 2015·2 cites·35 claims
- 1082US2025095398A1Image determining device to determine the state of a subjectNIKON CORP·Filed 2024·Application pending·0 cites
- 1182US2024078831A1An image determining device to determine the state of a subjectNIKON CORP·Filed 2023·Application pending·0 cites
- 1278US10255491B2Guidance system, detection device, and position assessment deviceSEKIGUCHI MASAKAZU·Filed 2011·Granted Apr 9, 2019·12 cites·13 claims
- 1377US8089611B2Exposure apparatus and method for producing deviceNEI MASAHIRO·Filed 2009·Granted Jan 3, 2012·4 cites·21 claims
- 1474US6492649B1Projection exposure apparatus, projection exposure method, optical cleaning method and method of fabricating semiconductor deviceNIKON CORP·Filed 2000·Granted Dec 10, 2002·18 cites·61 claims
- 1573US7817244B2Exposure apparatus and method for producing deviceNIKON CORP·Filed 2006·Granted Oct 19, 2010·2 cites·17 claims
- 1672US7834976B2Exposure apparatus and method for producing deviceNIKON CORP·Filed 2006·Granted Nov 16, 2010·2 cites·13 claims
- 1768US11055522B2Image determining device to determine the state of a subjectNIKON CORP·Filed 2019·Granted Jul 6, 2021·0 cites·10 claims
- 1865US9268237B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted Feb 23, 2016·0 cites·26 claims
- 1964US9846371B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIPPON KOGAKU KK·Filed 2015·Granted Dec 19, 2017·0 cites·17 claims
- 2064US9047751B2Image determining device to determine the state of a subjectYAMAMOTO TETSUYA·Filed 2010·Granted Jun 2, 2015·1 cites·25 claims
- 2163US10275645B2Image determining device to determine the state of a subjectNIKON CORP·Filed 2017·Granted Apr 30, 2019·0 cites·11 claims
- 2262US5872618AProjection exposure apparatusNIKON CORP·Filed 1997·Granted Feb 16, 1999·22 cites·31 claims
- 2362US2017329234A1Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2017·Application pending·0 cites
- 2461US8384880B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2008·Granted Feb 26, 2013·0 cites·17 claims
- 2561US8208117B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodOWA SOICHI·Filed 2008·Granted Jun 26, 2012·0 cites·8 claims
- 2655US2013138451A1Infection spread prevention support system, infection spread prevention support server, examination terminal, mobile terminal and programNIKON CORP·Filed 2012·Application pending·0 cites
- 2753US2006227312A1Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2006·Application pending·0 cites
- 2853US2015235077A1Image determining device to determine the state of a subjectNIKON CORP·Filed 2015·Application pending·0 cites
- 2953US2006152699A1Exposure apparatus and method for producing deviceNIKON CORP·Filed 2006·Application pending·0 cites
- 3050US2005219488A1Exposure apparatus and method for producing deviceNIKON CORP·Filed 2005·Application pending·0 cites
- 3142US8780326B2Exposure apparatus, exposure method, and device manufacturing methodKIUCHI TOHRU·Filed 2006·Granted Jul 15, 2014·0 cites·20 claims
- 3240US2013321625A1Electronic device and information transmission systemYANAGIHARA MASAMITSU·Filed 2012·Application pending·0 cites
- 3337US2003090644A1Mask and exposure apparatusNIKON CORP·Filed 2002·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Masahiro Nei files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →