Inventor · disambiguated record
Masatoshi Oyama
Also filed as: OYAMA MASATOSHI
5 granted patents·6 pending applications·3 citations·filing 2001–2020
65Inventor score
Top patents by PatentIndex Score
11 records- 0165US7585776B2Dry etching method of insulating filmHITACHI HIGH TECH CORP·Filed 2007·Granted Sep 8, 2009·2 cites·9 claims
- 0248US7354525B2Specimen surface processing apparatus and surface processing methodHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 8, 2008·0 cites·10 claims
- 0347US2009065479A1Dry etching method of high-k filmNAKAUNE KOICHI·Filed 2008·Application pending·0 cites
- 0443US11489990B2Optical element, optical system, and imaging apparatusAGC INC·Filed 2020·Granted Nov 1, 2022·0 cites·20 claims
- 0542US2010297849A1Plasma etching method for etching an objectMIYAKE MASATOSHI·Filed 2009·Application pending·0 cites
- 0642US2011171833A1Dry etching method of high-k filmNAKAUNE KOICHI·Filed 2011·Application pending·0 cites
- 0740US8343619B2Optical waveguide filmTORAY INDUSTRIES·Filed 2007·Granted Jan 1, 2013·0 cites·18 claims
- 0839US6960533B2Method of processing a sample surface having a masking material and an anti-reflective film using a plasmaHITACHI LTD·Filed 2002·Granted Nov 1, 2005·1 cites·5 claims
- 0939US2004171273A1Specimen surface processing apparatus and surface processing methodFiled 2003·Application pending·0 cites
- 1038US2005126711A1Plasma processing apparatusFiled 2004·Application pending·0 cites
- 1128US2001017190A1Apparatus of processing a sample surface and method thereofFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →