Inventor · disambiguated record
Marko Punkkinen
Also filed as: PUNKKINEN MARKO
7 granted patents·3 pending applications·11 citations·filing 2011–2022
78Inventor score
Technology areasH10P
Top patents by PatentIndex Score
10 records- 0181US10256290B2Method for oxidizing a substrate surface using oxygenCOMPTEK SOLUTIONS OY·Filed 2017·Granted Apr 9, 2019·3 cites·7 claims
- 0279US9837486B2Method for oxidizing a substrate surface using oxygenCOMPTEK SOLUTIONS OY·Filed 2015·Granted Dec 5, 2017·3 cites·11 claims
- 0374US9269763B2Method for treating a substrate and a substrateLAUKKANEN PEKKA·Filed 2011·Granted Feb 23, 2016·4 cites·12 claims
- 0469US11923236B2Silicon-on-insulator with crystalline silicon oxideTURUN YLIOPISTO·Filed 2022·Granted Mar 5, 2024·0 cites·19 claims
- 0567US11443977B2Silicon-on-insulator with crystalline silicon oxideTURUN YLIOPISTO·Filed 2018·Granted Sep 13, 2022·1 cites·13 claims
- 0657US11646193B2Manufacturing of foreign oxide or foreign nitride on semiconductorTURUN YLIOPISTO·Filed 2019·Granted May 9, 2023·0 cites·10 claims
- 0748US2024321590A1Semiconductor structure, semiconductor device, and methodTURUN YLIOPISTO·Filed 2022·Application pending·0 cites
- 0847US11615952B2Manufacturing of foreign oxide or foreign nitride on semiconductorTURUN YLIOPISTO·Filed 2016·Granted Mar 28, 2023·0 cites·10 claims
- 0943US2023223252A1Method, semiconductor structure, and vacuum processing systemTURUN YLIOPISTO·Filed 2021·Application pending·0 cites
- 1039US2022208546A1Semiconductor structre and methodTURUN YLIOPISTO·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →