Inventor · disambiguated record
Markus Renno
Also filed as: RENNO MARKUS
2 granted patents·8 pending applications·51 citations·filing 2003–2010
62Inventor score
Top patents by PatentIndex Score
10 records- 0188US7029803B2Attenuating phase shift mask blank and photomaskIBM·Filed 2003·Granted Apr 18, 2006·45 cites·50 claims
- 0256US7517617B2Mask blank for use in EUV lithography and method for its productionSCHOTT AG·Filed 2004·Granted Apr 14, 2009·6 cites·33 claims
- 0346US2010313943A1Thin-film solar cell and process for producing itKNOLL HARTMUT·Filed 2010·Application pending·0 cites
- 0439US2006008749A1Method for manufacturing of a mask blank for EUV photolithography and mask blankSOBEL FRANK·Filed 2004·Application pending·0 cites
- 0537US2007128528A1Mask blank and photomask having antireflective propertiesHESS GUNTER·Filed 2006·Application pending·0 cites
- 0635US2004231971A1Photo mask blank, photo mask, method and apparatus for manufacturing of a photo mask blankFiled 2004·Application pending·0 cites
- 0734US2005260504A1Mask blank having a protection layerBECKER HANS·Filed 2005·Application pending·0 cites
- 0834US2007076833A1Attenuated phase shift mask blank and photomaskBECKER HANS·Filed 2004·Application pending·0 cites
- 0934US2005190450A1Ultra high transmission phase shift mask blanksFiled 2005·Application pending·0 cites
- 1033US2006115744A1Method of producing a mask blank for photolithographic applications, and mask blankASCHKE LUTZ·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →