Inventor · disambiguated record
Maksim Riabko
Also filed as: RIABKO MAKSIM · RIABKO Maksim Vladimirovich
6 granted patents·1 pending application·9 citations·filing 2015–2021
74Inventor score
Files withSAMSUNG ELECTRONICS CO LTD7
Top patents by PatentIndex Score
7 records- 0185US9995648B2Optical measurement system and method for measuring critical dimension of nanostructureSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jun 12, 2018·5 cites·17 claims
- 0277US11823961B2Substrate inspection system and method of manufacturing semiconductor device using substrate inspection systemSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Nov 21, 2023·1 cites·20 claims
- 0377US10831082B2Apparatus and method for controlling laser light propagation direction by using a plurality of nano-antennasSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Nov 10, 2020·2 cites·18 claims
- 0475US10816480B2Method of detecting a defect on a substrate, apparatus for performing the same and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Oct 27, 2020·1 cites·19 claims
- 0556US11789332B2Apparatus and method for controlling laser light propagation direction by using a plurality of nano-antennasSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Oct 17, 2023·0 cites·2 claims
- 0648US2022120662A1Particle inspection device based on spatial modulation method and particle inspection method using the particle inspection deviceSAMSUNG ELECTRONICS CO LTD·Filed 2021·Application pending·0 cites
- 0745US10296776B2Device and method for biometrics authenticationSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted May 21, 2019·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →