Inventor · disambiguated record
Mario Schiffler
Also filed as: SCHIFFLER MARIO
1 granted patent·3 pending applications·6 citations·filing 2003–2004
28Inventor score
Files withSCHOTT AG1
Top patents by PatentIndex Score
4 records- 0156US7517617B2Mask blank for use in EUV lithography and method for its productionSCHOTT AG·Filed 2004·Granted Apr 14, 2009·6 cites·33 claims
- 0239US2004159538A1Photo mask blank, photo mask, method and apparatus for manufacturing of a photo mask blankFiled 2003·Application pending·0 cites
- 0335US2004231971A1Photo mask blank, photo mask, method and apparatus for manufacturing of a photo mask blankFiled 2004·Application pending·0 cites
- 0433US2005020087A1Method and apparatus for removing an edge region of a layer applied to a substrate and for coating a substrate and a substrateFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →