Inventor · disambiguated record
Martin Sczyrba
Also filed as: SCZYRBA MARTIN
2 granted patents·1 pending application·23 citations·filing 2006–2009
53Inventor score
Top patents by PatentIndex Score
3 records- 0185US8257888B2Particle beam writing method, particle beam writing apparatus and maintenance method for sameSCZYRBA MARTIN·Filed 2009·Granted Sep 4, 2012·23 cites·16 claims
- 0232US7811727B2Method for determining an exposure dose and exposure apparatusADVANCED MASK TECHNOLOGY CT GMBH·Filed 2006·Granted Oct 12, 2010·0 cites·20 claims
- 0328US2007263192A1Illumination system and a photolithography apparatus employing the systemADVANCED MASK TECHNOLOGY CT GMBH·Filed 2007·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Martin Sczyrba files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →