Inventor · disambiguated record
Masahiro Shibagaki
Also filed as: NIWA KAZUO · SHIBAGAKI MASAHIRO · YAMAMOTO SHINICHI
9 granted patents·697 citations·filing 1976–1985
92Inventor score
Top patents by PatentIndex Score
9 records- 0196US4151034AContinuous gas plasma etching apparatusTOKYO SHIBAURA ELECTRIC CO·Filed 1977·Granted Apr 24, 1979·121 cites·14 claims
- 0295US4065369AActivated gas reaction apparatus & methodTOKYO SHIBAURA ELECTRIC CO·Filed 1976·Granted Dec 27, 1977·81 cites·10 claims
- 0394US4277304AIon source and ion etching processTOKYO SHIBAURA ELECTRIC CO·Filed 1979·Granted Jul 7, 1981·61 cites·9 claims
- 0490US4693777AApparatus for producing semiconductor devicesTOSHIBA KK·Filed 1985·Granted Sep 15, 1987·178 cites·49 claims
- 0589US4160690AGas etching method and apparatusTOKYO SHIBAURA ELECTRIC CO·Filed 1978·Granted Jul 10, 1979·53 cites·12 claims
- 0685US4252595AEtching apparatus using a plasmaTOKYO SHIBAURA ELECTRIC CO·Filed 1978·Granted Feb 24, 1981·46 cites·6 claims
- 0783US4175235AApparatus for the plasma treatment of semiconductorsTOKYO SHIBAURA ELECTRIC CO·Filed 1977·Granted Nov 20, 1979·29 cites·9 claims
- 0883US4094722AEtching apparatus using a plasmaTOKYO SHIBAURA ELECTRIC CO·Filed 1977·Granted Jun 13, 1978·41 cites·10 claims
- 0976US4339079AFragrance emitterSATO OSAMU·Filed 1981·Granted Jul 13, 1982·87 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →