Inventor · disambiguated record
Masaki Shiozawa
Also filed as: SHIOZAWA MASAKI
7 granted patents·114 citations·filing 1998–2011
85Inventor score
Top patents by PatentIndex Score
7 records- 0185US6377332B1Optical member for photolithography and photolithography apparatusNIKON CORP·Filed 2000·Granted Apr 23, 2002·28 cites·22 claims
- 0276US6320700B2Light-transmitting optical member, manufacturing method thereof, evaluation method therefor, and optical lithography apparatus using the optical memberNIKON CORP·Filed 2001·Granted Nov 20, 2001·14 cites·1 claims
- 0373US6061174AImage-focusing optical system for ultraviolet laserNIKON CORP·Filed 1998·Granted May 9, 2000·32 cites·19 claims
- 0469US6226128B1Light-transmitting optical member, manufacturing method thereof, evaluation method therefor, and optical lithography apparatus using the optical memberNIKON CORP·Filed 1999·Granted May 1, 2001·25 cites·9 claims
- 0560US5978070AProjection exposure apparatusNIKON CORP·Filed 1998·Granted Nov 2, 1999·15 cites·9 claims
- 0640US8724076B2Projection exposure apparatus, cleaning and maintenance methods of a projection exposure apparatus, and device manufacturing methodTANI YASUHISA·Filed 2011·Granted May 13, 2014·0 cites·15 claims
- 0739US7940309B2Optical low pass filter and image-capturing deviceNIKON CORP·Filed 2005·Granted May 10, 2011·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →