Inventor · disambiguated record
Masumi Shirai
Also filed as: SHIRAI MASUMI
5 granted patents·6 citations·filing 2012–2020
66Inventor score
Technology areasH01J
Top patents by PatentIndex Score
5 records- 0175US9129353B2Charged particle beam device, and image analysis deviceSHIRAI MASUMI·Filed 2012·Granted Sep 8, 2015·5 cites·9 claims
- 0258US9679744B2Charged particle beam apparatus and method of correcting landing angle of charged particle beamHITACHI HIGH TECH CORP·Filed 2012·Granted Jun 13, 2017·1 cites·12 claims
- 0348US11791130B2Electron beam observation device, electron beam observation system, and image correcting method and method for calculating correction factor for image correction in electron beam observation deviceHITACHI HIGH TECH CORP·Filed 2019·Granted Oct 17, 2023·0 cites·28 claims
- 0446US12505976B2Charged particle beam apparatus and method for calculating roughness indexHITACHI HIGH TECH CORP·Filed 2020·Granted Dec 23, 2025·0 cites·14 claims
- 0543US12463005B2Correction coefficient calculation device, correction coefficient calculation method, and correction coefficient calculation programHITACHI HIGH TECH CORP·Filed 2020·Granted Nov 4, 2025·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →