Inventor · disambiguated record
Masafumi Shiratani
Also filed as: SHIRATANI MASAFUMI
3 granted patents·1 pending application·7 citations·filing 2006–2010
58Inventor score
Top patents by PatentIndex Score
4 records- 0178US8562392B2Polishing apparatus and polishing methodSHIRATANI MASAFUMI·Filed 2010·Granted Oct 22, 2013·5 cites·20 claims
- 0259US8334210B2Method and apparatus of manufacturing semiconductor deviceSHIRATANI MASAFUMI·Filed 2007·Granted Dec 18, 2012·2 cites·19 claims
- 0340US2007224923A1Polishing pad, chemical mechanical polishing apparatus and method for manufacturing polishing padNEC ELECTRONICS CORP·Filed 2007·Application pending·0 cites
- 0436US7779848B2Apparatus and method for cleaning semiconductor waferNEC ELECTRONICS CORP·Filed 2006·Granted Aug 24, 2010·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →