Inventor · disambiguated record
Mark Steven Slezak
Also filed as: SLEZAK MARK · SLEZAK MARK S · SLEZAK MARK STEVEN
2 granted patents·1 pending application·27 citations·filing 1998–2008
59Inventor score
Technology areasG03F
Top patents by PatentIndex Score
3 records- 0168US7951524B2Self-topcoating photoresist for photolithographyIBM·Filed 2008·Granted May 31, 2011·3 cites·26 claims
- 0263US6368421B1Composition for stripping photoresist and organic materials from substrate surfacesCLARIANT FINANCE BVI LTD·Filed 1998·Granted Apr 9, 2002·24 cites·10 claims
- 0334US2009098490A1Radiation-Sensitive, Wet Developable Bottom Antireflective Coating Compositions and Their Applications in Semiconductor ManufacturingPHAM VICTOR·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →