Inventor · disambiguated record
Maris A. Sturans
Also filed as: STURANS MARIS A · STURANS MARIS ANDRIS
19 granted patents·286 citations·filing 1979–2007
95Inventor score
Files withIBM19
Top patents by PatentIndex Score
19 records- 0194US4376249AVariable axis electron beam projection systemIBM·Filed 1980·Granted Mar 8, 1983·54 cites·14 claims
- 0290US4544846AVariable axis immersion lens electron beam projection systemIBM·Filed 1983·Granted Oct 1, 1985·37 cites·17 claims
- 0382US6806943B2Mask clamping deviceIBM·Filed 2002·Granted Oct 19, 2004·24 cites·22 claims
- 0479US4251728ACompensated magnetic deflection coil for electron beam lithography systemIBM·Filed 1979·Granted Feb 17, 1981·17 cites·15 claims
- 0576US4859856ATelecentric sub-field deflection with vailIBM·Filed 1988·Granted Aug 22, 1989·21 cites·7 claims
- 0675US4945246ATri-deflection electron beam systemIBM·Filed 1989·Granted Jul 31, 1990·21 cites·13 claims
- 0774US6586746B1Multipole electrostatic e-beam deflectorIBM·Filed 2000·Granted Jul 1, 2003·12 cites·12 claims
- 0866US5043586APlanarized, reusable calibration gridsIBM·Filed 1990·Granted Aug 27, 1991·19 cites·13 claims
- 0965US6710361B2Multi-beam hybrid solenoid lens electron beam systemIBM·Filed 2002·Granted Mar 23, 2004·6 cites·13 claims
- 1063US5169488AMethod of forming planarized, reusable calibration gridsIBM·Filed 1991·Granted Dec 8, 1992·16 cites·18 claims
- 1161US6130432AParticle beam system with dynamic focusingIBM·Filed 1999·Granted Oct 10, 2000·15 cites·17 claims
- 1260US6486953B1Accurate real-time landing angle and telecentricity measurement in lithographic systemsIBM·Filed 2000·Granted Nov 26, 2002·4 cites·18 claims
- 1357US6028662AAdjustment of particle beam landing angleIBM·Filed 1999·Granted Feb 22, 2000·12 cites·10 claims
- 1454US5570405ARegistration and alignment technique for X-ray mask fabricationIBM·Filed 1995·Granted Oct 29, 1996·18 cites·15 claims
- 1550US6633040B1Solenoid electron beam lenses with high demagnification and low aberrationsIBM·Filed 2002·Granted Oct 14, 2003·1 cites·13 claims
- 1647US4737644AConductive coated semiconductor electrostatic deflection platesIBM·Filed 1985·Granted Apr 12, 1988·7 cites·12 claims
- 1741US7863563B2Carbon tube for electron beam applicationIBM·Filed 2007·Granted Jan 4, 2011·0 cites·18 claims
- 1838US6429607B1Constant power dynamic focus coilIBM·Filed 2000·Granted Aug 6, 2002·0 cites·30 claims
- 1935US6369396B1Calibration target for electron beamsIBM·Filed 1999·Granted Apr 9, 2002·2 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →