Inventor · disambiguated record
Manabu Tagami
Also filed as: TAGAMI MANABU
6 granted patents·381 citations·filing 1996–2001
87Inventor score
Files withANELVA CORP6
Top patents by PatentIndex Score
6 records- 0195US5676758ACVD apparatusANELVA CORP·Filed 1996·Granted Oct 14, 1997·209 cites·12 claims
- 0287US6872289B2Thin film fabrication method and thin film fabrication apparatusANELVA CORP·Filed 2001·Granted Mar 29, 2005·42 cites·14 claims
- 0384US5624499ACVD apparatusANELVA CORP·Filed 1996·Granted Apr 29, 1997·70 cites·27 claims
- 0477US6348238B1Thin film fabrication method and thin film fabrication apparatusANELVA CORP·Filed 2000·Granted Feb 19, 2002·20 cites·14 claims
- 0560US5893962AElectrode unit for in-situ cleaning in thermal CVD apparatusANELVA CORP·Filed 1996·Granted Apr 13, 1999·28 cites·18 claims
- 0645US5956616AMethod of depositing thin films by plasma-enhanced chemical vapor depositionANELVA CORP·Filed 1997·Granted Sep 21, 1999·12 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →