Inventor · disambiguated record
Masuo Tanno
Also filed as: TANNO MASUO
7 granted patents·386 citations·filing 1984–1994
88Inventor score
Files withMATSUSHITA ELECTRIC INDUSTRIAL CO LTD7
Top patents by PatentIndex Score
7 records- 0195US4912065APlasma doping methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1988·Granted Mar 27, 1990·171 cites·5 claims
- 0293US4937205APlasma doping process and apparatus thereforMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1988·Granted Jun 26, 1990·160 cites·14 claims
- 0358US4906347ADry-etching apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1988·Granted Mar 6, 1990·10 cites·1 claims
- 0452US5360106AMethod for transporting/storing wafer and wafer carrierMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1993·Granted Nov 1, 1994·19 cites·10 claims
- 0550US4678539ADry-etching methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1985·Granted Jul 7, 1987·18 cites·9 claims
- 0632US5502953AMethod for transporting/storing a wafer in a wafer carrierMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1994·Granted Apr 2, 1996·4 cites·10 claims
- 0732US4612099AReactive ion etching methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1984·Granted Sep 16, 1986·4 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →