Inventor · disambiguated record
Mark E. Towner
Also filed as: TOWNER MARK E
2 granted patents·78 citations·filing 1988–1989
66Inventor score
Technology areasG03F
Top patents by PatentIndex Score
2 records- 0184US4886728AUse of particular mixtures of ethyl lactate and methyl ethyl ketone to remove undesirable peripheral material (e.g. edge beads) from photoresist-coated substratesOLIN HUNT SPECIALTY PROD·Filed 1988·Granted Dec 12, 1989·58 cites·11 claims
- 0266US5151219AUse of particular mixtures of ethyl lactate and methyl ethyl ketone to remove undesirable peripheral material (e.g. edge beads) from photoresist-coated substratesOCG MICROELECTRONIC MATERIALS·Filed 1989·Granted Sep 29, 1992·20 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →