Inventor · disambiguated record
Masami Tsukamoto
Also filed as: TSUKAMOTO MASAMI
27 granted patents·3 pending applications·605 citations·filing 1996–2025
97Inventor score
Top patents by PatentIndex Score
30 records- 0195US9231188B2Piezoelectric ceramics, manufacturing method therefor, piezoelectric element, liquid discharge head, ultrasonic motor, and dust removal deviceSUZUKI TATSUYA·Filed 2011·Granted Jan 5, 2016·12 cites·15 claims
- 0295US5896438AX-ray optical apparatus and device fabrication methodCANON KK·Filed 1997·Granted Apr 20, 1999·134 cites·9 claims
- 0393US7061573B2Contamination prevention in optical systemCANON KK·Filed 2001·Granted Jun 13, 2006·49 cites·26 claims
- 0492US6317479B1X-ray mask, and exposure method and apparatus using the sameCANON KK·Filed 1997·Granted Nov 13, 2001·75 cites·21 claims
- 0590US6084938AX-ray projection exposure apparatus and a device manufacturing methodCANON KK·Filed 1997·Granted Jul 4, 2000·52 cites·43 claims
- 0686US9842985B2Manufacturing method for piezoelectric ceramicsCANON KK·Filed 2015·Granted Dec 12, 2017·4 cites·2 claims
- 0786US6728332B2X-ray mask, and exposure method and apparatus using the sameCANON KK·Filed 2001·Granted Apr 27, 2004·20 cites·24 claims
- 0885US6802925B2Laminating film and lamination process using the sameCANON KK·Filed 2002·Granted Oct 12, 2004·17 cites·12 claims
- 0984US5995582AX-ray reduction exposure apparatus and device manufacturing method using the sameCANON KK·Filed 1997·Granted Nov 30, 1999·56 cites·20 claims
- 1076US6038279AX-ray generating device, and exposure apparatus and semiconductor device production method using the X-ray generating deviceCANON KK·Filed 1996·Granted Mar 14, 2000·48 cites·45 claims
- 1175US6504896B2X-ray illumination optical system and x-ray reduction exposure apparatusCANON KK·Filed 1997·Granted Jan 7, 2003·26 cites·31 claims
- 1272US6723475B2Reflection-type mask for use in pattern exposure, manufacturing method therefor, exposure apparatus, and method of manufacturing a deviceCANON KK·Filed 2001·Granted Apr 20, 2004·14 cites·35 claims
- 1372US6014421ARadiation reduction exposure apparatus and method of manufacturing semiconductor deviceCANON KK·Filed 1997·Granted Jan 11, 2000·31 cites·16 claims
- 1467US6331709B1Alignment mark detection method, and alignment method, exposure method and device, and device production method making use of the alignment mark detection methodCANON KK·Filed 1996·Granted Dec 18, 2001·17 cites·27 claims
- 1564US7072438B2Reflection type maskCANON KK·Filed 2003·Granted Jul 4, 2006·5 cites·9 claims
- 1664US6584168B2X-ray projection exposure apparatus and a device manufacturing methodCANON KK·Filed 2002·Granted Jun 24, 2003·5 cites·8 claims
- 1763US11774607B2Scintillator panel and radiation imaging apparatusCANON KK·Filed 2022·Granted Oct 3, 2023·0 cites·15 claims
- 1858US5889758AReflection type mask structure and exposure apparatus using the sameCANON KK·Filed 1997·Granted Mar 30, 1999·21 cites·15 claims
- 1956US6836531B2X-ray projection exposure apparatus and a device manufacturing methodCANON KK·Filed 2003·Granted Dec 28, 2004·2 cites·6 claims
- 2056US6819396B1Exposure apparatus, and device manufacturing methodCANON KK·Filed 2000·Granted Nov 16, 2004·4 cites·36 claims
- 2155US6668037B2X-ray projection exposure apparatus and a device manufacturing methodCANON KK·Filed 2001·Granted Dec 23, 2003·2 cites·10 claims
- 2254US7133489B2X-ray illumination optical system and X-ray reduction exposure apparatusCANON KK·Filed 2004·Granted Nov 7, 2006·2 cites·5 claims
- 2353US11069729B2Photoelectric conversion device, and equipmentCANON KK·Filed 2019·Granted Jul 20, 2021·0 cites·32 claims
- 2452US6310934B1X-ray projection exposure apparatus and a device manufacturing methodCANON KK·Filed 1999·Granted Oct 30, 2001·8 cites·28 claims
- 2552US2025224525A1Scintillator, radiation detector, radiation imaging system, and method of manufacturing scintillatorCANON KK·Filed 2025·Application pending·0 cites
- 2648US6642528B2Alignment mark detection method, and alignment method, exposure method and device, and device production method, making use of the alignment mark detection methodCANON KK·Filed 2001·Granted Nov 4, 2003·1 cites·14 claims
- 2748US2009226849A1Exposure apparatus and device manufacturing methodCANON KK·Filed 2009·Application pending·0 cites
- 2844US2015131139A1Optical elementCANON KABUSHIKIK KAISHA·Filed 2013·Application pending·0 cites
- 2942US6834098B2X-ray illumination optical system and X-ray reduction exposure apparatusCANON KK·Filed 2002·Granted Dec 21, 2004·0 cites·16 claims
- 3041US7425363B2Laminate film and composite structure with imaged recording mediumCANON KK·Filed 2005·Granted Sep 16, 2008·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →