Inventor · disambiguated record
Maarten Hubertus Van Es
Also filed as: VAN ES MAARTEN HUBERTUS
20 granted patents·3 pending applications·5 citations·filing 2015–2021
88Inventor score
Top patents by PatentIndex Score
23 records- 0174US10775405B2Method of and system for performing defect detection on or characterization of a layer of a semiconductor element or semi-manufactured semiconductor elementTNO·Filed 2017·Granted Sep 15, 2020·2 cites·15 claims
- 0272US10746702B2Method of tuning parameter settings for performing acoustic scanning probe microscopy for subsurface imaging, scanning probe microscopy system, and computer program productNEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO·Filed 2017·Granted Aug 18, 2020·1 cites·20 claims
- 0371US10935568B2Method of determining an overlay error, method for manufacturing a multilayer semiconductor device, atomic force microscopy device, lithographic system and semiconductor deviceTNO·Filed 2017·Granted Mar 2, 2021·1 cites·13 claims
- 0467US10859925B2Method of and system for determining an overlay or alignment error between a first and a second device layer of a multilayer semiconductor deviceTNO·Filed 2018·Granted Dec 8, 2020·1 cites·18 claims
- 0565US11644481B2Atomic force microscopy cantilever, system and methodTNO·Filed 2021·Granted May 9, 2023·0 cites·18 claims
- 0663US2020249255A1Atomic force microscopy cantilever, system and methodNEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO·Filed 2018·Application pending·0 cites
- 0757US11402405B2Frequency tracking for subsurface atomic force microscopyTNO·Filed 2019·Granted Aug 2, 2022·0 cites·15 claims
- 0854US12345737B2Method, system and computer program for performing acoustic scanning probe microscopyTNO·Filed 2021·Granted Jul 1, 2025·0 cites·17 claims
- 0949US12130258B2Ultrasound sub-surface probe microscopy device and corresponding methodTNO·Filed 2020·Granted Oct 29, 2024·0 cites·20 claims
- 1048US11927564B2Cantilever, ultrasound acoustic microscopy device comprising the cantilever, method of using the same and lithographic system including the sameTNO·Filed 2020·Granted Mar 12, 2024·0 cites·20 claims
- 1148US11067597B2Method of performing atomic force microscopy with an ultrasound transducerTNO·Filed 2018·Granted Jul 20, 2021·0 cites·18 claims
- 1247US11635448B2Heterodyne scanning probe microscopy method and scanning probe microscopy systemTNO·Filed 2020·Granted Apr 25, 2023·0 cites·16 claims
- 1347US10948458B2Method of and system for performing detection on or characterization of a sampleTNO·Filed 2018·Granted Mar 16, 2021·0 cites·11 claims
- 1443US11035878B2Atomic force microscopy system, method for mapping one or more subsurface structures located in a semiconductor device or for monitoring lithographic parameters in a semiconductor device and use of such an atomic force microscopy systemTNO·Filed 2018·Granted Jun 15, 2021·0 cites·14 claims
- 1543US2021003608A1Method and system for at least subsurface characterization of a sampleTNO·Filed 2019·Application pending·0 cites
- 1642US11940416B2Heterodyne scanning probe microscopy method and systemTNO·Filed 2017·Granted Mar 26, 2024·0 cites·14 claims
- 1741US11268935B2Method of and atomic force microscopy system for performing subsurface imagingTNO·Filed 2018·Granted Mar 8, 2022·0 cites·18 claims
- 1840US12332574B2Lithographic patterning method and system thereforeTNO·Filed 2019·Granted Jun 17, 2025·0 cites·20 claims
- 1940US12169187B2Method of and system for performing subsurface imaging using vibration sensingTNO·Filed 2018·Granted Dec 17, 2024·0 cites·19 claims
- 2040US10942200B2Heterodyne atomic force microscopy device, method and lithographic systemTNO·Filed 2018·Granted Mar 9, 2021·0 cites·20 claims
- 2138US10976345B2Atomic force microscopy device, method and lithographic systemTNO·Filed 2018·Granted Apr 13, 2021·0 cites·18 claims
- 2237US9897626B2Scanning probe microscope with a reduced Q-factorTNO·Filed 2015·Granted Feb 20, 2018·0 cites·7 claims
- 2337US2022205953A1Method and system for imaging structures below the surface of a sampleTNO·Filed 2020·Application pending·0 cites
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