Inventor · disambiguated record
Maxime Varvara
Also filed as: VARVARA MAXIME
1 granted patent·2 pending applications·0 citations·filing 2014–2021
4Inventor score
Files withSPTS TECHNOLOGIES LTD3
Top patents by PatentIndex Score
3 records- 0137US12362152B2Plasma etching apparatus and methodSPTS TECHNOLOGIES LTD·Filed 2021·Granted Jul 15, 2025·0 cites·18 claims
- 0236US2014352889A1Apparatus for processing a semiconductor workpieceSPTS TECHNOLOGIES LTD·Filed 2014·Application pending·0 cites
- 0326US2018218888A9Plasma etching apparatusSPTS TECHNOLOGIES LTD·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →