Inventor · disambiguated record
Matthias Vaupel
Also filed as: VAUPEL MATTHIAS
3 granted patents·1 pending application·13 citations·filing 2001–2018
59Inventor score
Top patents by PatentIndex Score
4 records- 0164US10436571B2Confocal microscope for determination of a layer thickness and microscopy method for determination of a layer thicknessZEISS CARL MICROSCOPY GMBH·Filed 2018·Granted Oct 8, 2019·1 cites·15 claims
- 0262US6867865B2SPR sensorNANOFILM TECHNOLOGIE GMBH·Filed 2001·Granted Mar 15, 2005·12 cites·27 claims
- 0348US9097518B2Method for determining roughness data and/or topography data of surfaces in material microscopyZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted Aug 4, 2015·0 cites·14 claims
- 0440US2007216901A1Ellipsometry Device Provided With A Resonance PlatformOC OERLIKON BALZERS AG·Filed 2005·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Matthias Vaupel files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →