Inventor · disambiguated record
Matthew Wormington
Also filed as: WORMINGTON MATTHEW
25 granted patents·5 pending applications·328 citations·filing 1999–2025
96Inventor score
Files withBRUKER TECH LTD8BRUKER JV ISRAEL LTD6JORDAN VALLEY SEMICONDUCTORS LTD4BEDE SCIENT INSTR LTD3JORDAN VALLEY SEMICONDUCTORS2
Top patents by PatentIndex Score
30 records- 0197US10976270B2X-ray detection optics for small-angle X-ray scatterometryBRUKER JV ISRAEL LTD·Filed 2019·Granted Apr 13, 2021·23 cites·18 claims
- 0294US9606073B2X-ray scatterometry apparatusJORDAN VALLEY SEMICONDUCTORS LTD·Filed 2015·Granted Mar 28, 2017·17 cites·20 claims
- 0393US8687766B2Enhancing accuracy of fast high-resolution X-ray diffractometryWORMINGTON MATTHEW·Filed 2011·Granted Apr 1, 2014·27 cites·18 claims
- 0493US8437450B2Fast measurement of X-ray diffraction from tilted layersWALL JOHN·Filed 2010·Granted May 7, 2013·23 cites·16 claims
- 0593US8243878B2High-resolution X-ray diffraction measurement with enhanced sensitivityYOKHIN BORIS·Filed 2010·Granted Aug 14, 2012·22 cites·42 claims
- 0692US11181490B2Small-angle x-ray scatterometryBRUKER TECH LTD·Filed 2019·Granted Nov 23, 2021·10 cites·25 claims
- 0792US9726624B2Using multiple sources/detectors for high-throughput X-ray topography measurementJORDAN VALLEY SEMICONDUCTORS LTD·Filed 2015·Granted Aug 8, 2017·7 cites·14 claims
- 0891US9829448B2Measurement of small features using XRFJORDAN VALLEY SEMICONDUCTORS LTD·Filed 2015·Granted Nov 28, 2017·8 cites·20 claims
- 0990US10816487B2Image contrast in X-ray topography imaging for defect inspectionBRUKER JV ISRAEL LTD·Filed 2019·Granted Oct 27, 2020·13 cites·18 claims
- 1089US10634628B2X-ray fluorescence apparatus for contamination monitoringBRUKER JV ISRAEL LTD·Filed 2018·Granted Apr 28, 2020·24 cites·32 claims
- 1188US8731138B2High-resolution X-ray diffraction measurement with enhanced sensitivityYOKHIN BORIS·Filed 2012·Granted May 20, 2014·8 cites·16 claims
- 1287US10976268B2X-ray source optics for small-angle X-ray scatterometryBRUKER JV ISRAEL LTD·Filed 2019·Granted Apr 13, 2021·2 cites·27 claims
- 1385US10386313B2Closed-loop control of X-ray knife edgeBRUKER JV ISRAEL LTD·Filed 2017·Granted Aug 20, 2019·3 cites·16 claims
- 1485US8781070B2Detection of wafer-edge defectsWORMINGTON MATTHEW·Filed 2012·Granted Jul 15, 2014·7 cites·20 claims
- 1585US6192103B1Fitting of X-ray scattering data using evolutionary algorithmsBEDE SCIENT INC·Filed 1999·Granted Feb 20, 2001·105 cites·24 claims
- 1679US6782076B2X-ray topographic systemBEDE SCIENT INSTR LTD·Filed 2001·Granted Aug 24, 2004·23 cites·17 claims
- 1778US12085521B2Small-angle X-ray scatterometryBRUKER TECH LTD·Filed 2023·Granted Sep 10, 2024·0 cites·16 claims
- 1877US10976269B2Wafer alignment for small-angle x-ray scatterometryBRUKER JV ISRAEL LTD·Filed 2019·Granted Apr 13, 2021·1 cites·16 claims
- 1977US2024377342A1Small-Angle X-Ray ScatterometryBRUKER TECH LTD·Filed 2024·Application pending·0 cites
- 2076US9389192B2Estimation of XRF intensity from an array of micro-bumpsJORDAN VALLEY SEMICONDUCTORS·Filed 2014·Granted Jul 12, 2016·2 cites·17 claims
- 2173US12249059B2Navigation accuracy using camera coupled with detector assemblyBRUKER TECH LTD·Filed 2022·Granted Mar 11, 2025·0 cites·23 claims
- 2271US11703464B2Small-angle x-ray scatterometryBRUKER TECH LTD·Filed 2021·Granted Jul 18, 2023·0 cites·19 claims
- 2366US2025157023A1Navigation accuracy using imaging assembly coupled with detector assembliesBRUKER TECH LTD·Filed 2025·Application pending·0 cites
- 2463US2025354943A1Analysis of Low-energy X-ray Fluorescence Emitted from Sample in Atmospheric EnvironmentBRUKER TECH LTD·Filed 2025·Application pending·0 cites
- 2562US9666322B2X-ray source assemblyJORDAN VALLEY SEMICONDUCTORS LTD·Filed 2014·Granted May 30, 2017·2 cites·16 claims
- 2658US11761913B2Transmission X-ray critical dimension (T-XCD) characterization of shift and tilt of stacks of high-aspect-ratio (HAR) structuresBRUKER TECH LTD·Filed 2021·Granted Sep 19, 2023·0 cites·18 claims
- 2754US8565379B2Combining X-ray and VUV analysis of thin film layersMAZOR ISAAC·Filed 2012·Granted Oct 22, 2013·1 cites·12 claims
- 2843US9390984B2X-ray inspection of bumps on a semiconductor substrateJORDAN VALLEY SEMICONDUCTORS·Filed 2012·Granted Jul 12, 2016·0 cites·14 claims
- 2940US2006159229A1Positioning apparatusBEDE SCIENT INSTR LTD·Filed 2005·Application pending·0 cites
- 3038US2006159225A1X-ray detection systemBEDE SCIENT INSTR LTD·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →