Inventor · disambiguated record
Masahiko Yasuda
Also filed as: YASUDA MASAHIKO
36 granted patents·4 pending applications·1,108 citations·filing 1989–2019
98Inventor score
Top patents by PatentIndex Score
40 records- 0197US8072578B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodYASUDA MASAHIKO·Filed 2008·Granted Dec 6, 2011·551 cites·5 claims
- 0296US6876946B2Alignment method and apparatus thereforNIKON CORP·Filed 2002·Granted Apr 5, 2005·80 cites·25 claims
- 0395US6549271B2Exposure apparatus and methodNIKON CORP·Filed 2002·Granted Apr 15, 2003·58 cites·14 claims
- 0493US6278957B1Alignment method and apparatus thereforNIKON CORP·Filed 1999·Granted Aug 21, 2001·116 cites·8 claims
- 0592US9857692B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodNIPPON KOGAKU KK·Filed 2016·Granted Jan 2, 2018·3 cites·22 claims
- 0691US8059260B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodYASUDA MASAHIKO·Filed 2005·Granted Nov 15, 2011·8 cites·12 claims
- 0790US8576379B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodYASUDA MASAHIKO·Filed 2010·Granted Nov 5, 2013·4 cites·7 claims
- 0890US6888621B2Mask-holding apparatus for a light exposure apparatus and related scanning-exposure methodNIKON CORP·Filed 2003·Granted May 3, 2005·32 cites·37 claims
- 0989US9298108B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2015·Granted Mar 29, 2016·2 cites·22 claims
- 1085US10222708B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2017·Granted Mar 5, 2019·1 cites·28 claims
- 1185US6353078B1Polyurethane adhesive, method for use in bonding, and use of mixtureKYOWA YUKA KK·Filed 1998·Granted Mar 5, 2002·52 cites·4 claims
- 1283US8477310B2Measurement method, measurement apparatus, exposure method, and exposure apparatusKOBAYASHI MITSURU·Filed 2005·Granted Jul 2, 2013·6 cites·21 claims
- 1382US5601957AMicro devices manufacturing method comprising the use of a second pattern overlying an alignment mark to reduce flatteningNIKON CORP·Filed 1995·Granted Feb 11, 1997·43 cites·10 claims
- 1480US8130361B2Exposure apparatus, exposure method, and method for producing deviceYASUDA MASAHIKO·Filed 2006·Granted Mar 6, 2012·4 cites·72 claims
- 1579US9348238B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted May 24, 2016·1 cites·38 claims
- 1677US10209623B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2016·Granted Feb 19, 2019·1 cites·91 claims
- 1774US9383656B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2015·Granted Jul 5, 2016·1 cites·44 claims
- 1873US9063438B2Exposure apparatus, exposure method, and method for producing deviceYASUDA MASAHIKO·Filed 2012·Granted Jun 23, 2015·1 cites·41 claims
- 1973US5795687AProjection exposure method and alignmentNIKON CORP·Filed 1996·Granted Aug 18, 1998·35 cites·10 claims
- 2068US6566022B2Micro devices manufacturing method and apparatus thereforNIKON CORP·Filed 2001·Granted May 20, 2003·7 cites·19 claims
- 2166US9223230B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted Dec 29, 2015·0 cites·25 claims
- 2266US9223231B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted Dec 29, 2015·0 cites·39 claims
- 2366US2019155168A1Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2019·Application pending·0 cites
- 2463US6641962B2Micro devices manufacturing method utilizing concave and convex alignment mark patternsNIKON CORP·Filed 2003·Granted Nov 4, 2003·5 cites·11 claims
- 2560US8054465B2Position measurement methodNIKON CORP·Filed 2008·Granted Nov 8, 2011·0 cites·10 claims
- 2658US5142001APolyurethane compositionKYOWA HAKKO KOGYO KK·Filed 1991·Granted Aug 25, 1992·11 cites·20 claims
- 2758US2007216893A1Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2007·Application pending·0 cites
- 2857US5037934AMagnetic coating formulations and magnetic recording mediaKYOWA HAKKO KOGYO KK·Filed 1989·Granted Aug 6, 1991·9 cites·12 claims
- 2956US5003274AElectromagnetic relayJIDOSHA DENKI KOGYO KK·Filed 1990·Granted Mar 26, 1991·16 cites·6 claims
- 3055US6110021AMicro devices manufacturing method and apparatus thereforNIKON CORP·Filed 1998·Granted Aug 29, 2000·12 cites·5 claims
- 3155US6087466APolyurethane and polyester polyolKYOWA YUKA KK·Filed 1998·Granted Jul 11, 2000·12 cites·13 claims
- 3255US5292853APolyurethane resin containing a phosphoric acid groupKYOWA HAKKO KOGYO KK·Filed 1991·Granted Mar 8, 1994·10 cites·8 claims
- 3354US5158830AMagnetic recording medium comprising a polyurethane resin coating residual groups derived from specified phosphorous containing compoundsGOODRICH CO B F·Filed 1991·Granted Oct 27, 1992·8 cites·4 claims
- 3453US8947665B2Measurement method, measurement apparatus, exposure method, and exposure apparatusKOBAYASHI MITSURU·Filed 2012·Granted Feb 3, 2015·0 cites·25 claims
- 3551US5162162AMagnetic coating formulations and magnetic recording mediaGOODRICH CO B F·Filed 1991·Granted Nov 10, 1992·8 cites·4 claims
- 3643US5330669AMagnetic coating formulationsKYOWA HAKKO KOGYO KK·Filed 1993·Granted Jul 19, 1994·5 cites·6 claims
- 3740US2001049589A1Alignment method and apparatus thereforNIKON CORP·Filed 2001·Application pending·0 cites
- 3839US2003179354A1Mask-holding apparatus for a light exposure apparatus and related scanning-exposure methodNIKON CORP·Filed 2003·Application pending·0 cites
- 3934US5273826AMagnetic coating formulations and magnetic recording mediaGOODRICH CO B F·Filed 1993·Granted Dec 28, 1993·5 cites·6 claims
- 4033US6306548B1Micro devices manufacturing method and apparatus thereforNIKON CORP·Filed 1999·Granted Oct 23, 2001·1 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →