Inventor · disambiguated record
Masaaki Yomo
Also filed as: YOMO MASAAKI
1 granted patent·1 pending application·14 citations·filing 2001–2003
39Inventor score
Technology areasG03F
Top patents by PatentIndex Score
2 records- 0167US6599670B2Method for compensating exposure value for exposure process in semiconductor manufacturing systemNEC ELECTRONICS CORP·Filed 2001·Granted Jul 29, 2003·14 cites·14 claims
- 0230US2003164932A1Method and system for compensating exposure value for exposure process as well as exposure system and semiconductor manufacturing systemNEC CORP·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →