Inventor · disambiguated record
Mehran Asdigha
Also filed as: ASDIGHA MEHRAN
6 granted patents·90 citations·filing 1997–2005
84Inventor score
Top patents by PatentIndex Score
6 records- 0176US6987272B2Work piece transfer system for an ion beam implanterAXCELIS TECH INC·Filed 2004·Granted Jan 17, 2006·22 cites·23 claims
- 0275US7267520B2Wafer scanning system with reciprocating rotary motion utilizing springs and counterweightsAXCELIS TECH INC·Filed 2005·Granted Sep 11, 2007·5 cites·22 claims
- 0371US5911896ASubstrate heating apparatus with glass-ceramic panels and thin film ribbon heater elementBROOKS AUTOMATION INC·Filed 1997·Granted Jun 15, 1999·37 cites·17 claims
- 0467US7112808B2Wafer 2D scan mechanismAXCELIS TECH INC·Filed 2004·Granted Sep 26, 2006·7 cites·21 claims
- 0562US7119343B2Mechanical oscillator for wafer scan with spot beamAXCELIS TECH INC·Filed 2004·Granted Oct 10, 2006·10 cites·39 claims
- 0641US6046435AMethod of heating a substrate with multiple selectively deactuated heatersBROOKS AUTOMATION INC·Filed 1999·Granted Apr 4, 2000·9 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →