Inventor · disambiguated record
Mei-Ru Kuo
Also filed as: KUO MEI-RU
3 granted patents·65 citations·filing 2001–2002
73Inventor score
Files withTAIWAN SEMICONDUCTOR MFG3
Top patents by PatentIndex Score
3 records- 0182US6440875B1Masking layer method for forming a spacer layer with enhanced linewidth controlTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Aug 27, 2002·33 cites·14 claims
- 0270US6436841B1Selectivity oxide-to-oxynitride etch process using a fluorine containing gas, an inert gas and a weak oxidantTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Aug 20, 2002·22 cites·33 claims
- 0356US6764911B2Multiple etch method for fabricating spacer layersTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jul 20, 2004·10 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →