Inventor · disambiguated record

Merlyn H. Perkins

Also filed as: PERKINS MERLYN H

3 granted patents·99 citations·filing 1974–1987

73Inventor score

Technology areasH01J

Files withIBM3

Top patents by PatentIndex Score

3 records

0193US4818885AElectron beam writing method and system using large range deflection in combination with a continuously moving tableIBM·Filed 1987·Granted Apr 4, 1989·79 cites·7 claims
0268US4000440AMethod and apparatus for controlling brightness and alignment of a beam of charged particlesIBM·Filed 1974·Granted Dec 28, 1976·12 cites·19 claims
0360US4066863AMethod and system for automatically correcting aberrations of a beam of charged particlesIBM·Filed 1974·Granted Jan 3, 1978·8 cites·57 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →