Inventor · disambiguated record
Mei Chin Shen
Also filed as: SHEN MEI · SHEN MEI CHIN
2 granted patents·6 pending applications·4 citations·filing 2016–2023
47Inventor score
Top patents by PatentIndex Score
8 records- 0177US9982068B2Redox active polymers and colloidal particles for flow batteriesUNIV ILLINOIS·Filed 2016·Granted May 29, 2018·2 cites·22 claims
- 0274US11180719B2Use of compositions comprising a siloxane-type additive for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or belowBASF SE·Filed 2018·Granted Nov 23, 2021·2 cites·15 claims
- 0352US2025305152A1Composition, its use and a process for cleaning substrates comprising cobalt and copperBASF SE·Filed 2023·Application pending·0 cites
- 0447US2025109332A1Composition, its use and a process for selectively etching silicon-germanium materialBASF SE·Filed 2023·Application pending·0 cites
- 0547US2025115809A1Composition, its use and a process for selectively etching silicon-germanium materialBASF SE·Filed 2023·Application pending·0 cites
- 0641US2023235252A1Use of a Composition Consisting of Ammonia and an Alkanol for Avoiding Pattern Collapse When Treating Patterned Materials with Line-Space Dimensions of 50 NM or BelowBASF SE·Filed 2021·Application pending·0 cites
- 0741US2023326759A1Composition, Its Use And A Process For Selectively Etching Silicon-Germanium MaterialBASF SE·Filed 2021·Application pending·0 cites
- 0839US2022169956A1Composition comprising an ammonia-activated siloxane for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or belowBASF SE·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →