Inventor · disambiguated record
Mei-Hui Sung
Also filed as: SUNG MEI-HUI
7 granted patents·422 citations·filing 1998–2004
87Inventor score
Top patents by PatentIndex Score
7 records- 0192US6689695B1Multi-purpose composite mask for dual damascene patterningTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Feb 10, 2004·290 cites·34 claims
- 0288US7012027B2Zirconium oxide and hafnium oxide etching using halogen containing chemicalsTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Mar 14, 2006·44 cites·14 claims
- 0378US6647994B1Method of resist stripping over low-k dielectric materialTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Nov 18, 2003·24 cites·28 claims
- 0478US6440838B1Dual damascene structure employing laminated intermediate etch stop layerTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Aug 27, 2002·30 cites·10 claims
- 0576US6582974B2Method for forming a dual damascene aperture while employing a peripherally localized intermediate etch stop layerTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Jun 24, 2003·29 cites·15 claims
- 0629US6024802AVapor treatment process for reducing oxide depletionWINBOND ELECTRONICS CORP·Filed 1998·Granted Feb 15, 2000·3 cites·20 claims
- 0722US6380090B1Protecting method applied to the semiconductor manufacturing processWINBOND ELECTRINICS CORP·Filed 1998·Granted Apr 30, 2002·2 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →