Inventor · disambiguated record
Mikio Arakawa
Also filed as: ARAKAWA MIKIO
2 granted patents·2 pending applications·2 citations·filing 2008–2016
34Inventor score
Top patents by PatentIndex Score
4 records- 0168US9054002B2Method for manufacturing photoelectric conversion deviceARAKAWA MIKIO·Filed 2012·Granted Jun 9, 2015·2 cites·20 claims
- 0240US2008198345A1Exposure apparatus and method of manufacturing deviceCANON KK·Filed 2008·Application pending·0 cites
- 0340US2008198347A1Immersion exposure apparatus and method of manufacturing deviceCANON KK·Filed 2008·Application pending·0 cites
- 0431US9583347B2Manufacturing method for semiconductor device using resist patterns and impurity injectionsCANON KK·Filed 2016·Granted Feb 28, 2017·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →