Inventor · disambiguated record
Michael R. Biche
Also filed as: BICHE MICHAEL R
9 granted patents·1 pending application·675 citations·filing 1981–2012
92Inventor score
Top patents by PatentIndex Score
10 records- 0195US4698775ASelf-contained mobile reprogrammable automation deviceFLEXIBLE MFG SYSTEMS·Filed 1985·Granted Oct 6, 1987·176 cites·8 claims
- 0290US4654573APower transfer deviceFLEXIBLE MFG SYSTEMS·Filed 1985·Granted Mar 31, 1987·153 cites·7 claims
- 0388US5651823AClustered photolithography systemSEMICONDUCTOR SYSTEMS INC·Filed 1995·Granted Jul 29, 1997·128 cites·23 claims
- 0482US5766824AMethod and apparatus for curing photoresistSEMICONDUCTOR SYSTEMS INC·Filed 1995·Granted Jun 16, 1998·82 cites·16 claims
- 0573US5935768AMethod of processing a substrate in a photolithography system utilizing a thermal process moduleSEMICONDUCTOR SYSTEMS INC·Filed 1997·Granted Aug 10, 1999·40 cites·24 claims
- 0671US4615615ALaser positioning systemFLEXIBLE MFG SYSTEMS·Filed 1984·Granted Oct 7, 1986·21 cites·10 claims
- 0761US5553994AThermal process module for substrate coat/develop systemSEMICONDUCTOR SYSTEMS INC·Filed 1994·Granted Sep 10, 1996·29 cites·8 claims
- 0861US5443348ACassette input/output unit for semiconductor processing systemSEMICONDUCTOR SYSTEMS INC·Filed 1993·Granted Aug 22, 1995·39 cites·9 claims
- 0941US4402623AApparatus for dynamically adjusting paper tension in a linear mannerQUME CORP·Filed 1981·Granted Sep 6, 1983·7 cites·1 claims
- 1035US2015135880A1Sealed robot base systemMOOG INC·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →