Inventor · disambiguated record
Michael Brugger
Also filed as: BRUGGER MICHAEL · BRUGGER MICHAEL C
18 granted patents·6 pending applications·67 citations·filing 2003–2022
92Inventor score
Top patents by PatentIndex Score
24 records- 0188US9245777B2Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatusLAM RES AG·Filed 2013·Granted Jan 26, 2016·11 cites·20 claims
- 0286US9190310B2Grounded chuckBRUGGER MICHAEL·Filed 2010·Granted Nov 17, 2015·10 cites·17 claims
- 0384US8608146B2Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pinBRUGGER MICHAEL·Filed 2009·Granted Dec 17, 2013·14 cites·15 claims
- 0482US9093482B2Method and apparatus for liquid treatment of wafer shaped articlesLAM RES AG·Filed 2012·Granted Jul 28, 2015·6 cites·14 claims
- 0577US11195695B2Ion implantation method, ion implantation apparatus and semiconductor deviceINFINEON TECHNOLOGIES AG·Filed 2018·Granted Dec 7, 2021·2 cites·13 claims
- 0670US8231939B2Device and method for wet treating plate-like-articlesBRUGGER MICHAEL·Filed 2007·Granted Jul 31, 2012·4 cites·16 claims
- 0769US10037887B2Method for implanting ions into a semiconductor substrate and an implantation systemINFINEON TECHNOLOGIES AG·Filed 2017·Granted Jul 31, 2018·1 cites·16 claims
- 0861US9972514B2Apparatus for liquid treatment of wafer shaped articlesLAM RES AG·Filed 2016·Granted May 15, 2018·1 cites·13 claims
- 0961US9536770B2Method and apparatus for liquid treatment of wafer shaped articlesLAM RES AG·Filed 2014·Granted Jan 3, 2017·2 cites·18 claims
- 1059US8936832B2Device and method for wet treating plate-like-articlesBRUGGER MICHAEL·Filed 2011·Granted Jan 20, 2015·1 cites·18 claims
- 1158US8029641B2Device and method for liquid treatment of wafer-shaped articlesLAM RES AG·Filed 2006·Granted Oct 4, 2011·3 cites·14 claims
- 1255US8888952B2Apparatus for wet treatment of plate-like articlesGIGACHER MARKUS·Filed 2008·Granted Nov 18, 2014·3 cites·17 claims
- 1355USD493377SRetractable chalk lineFiled 2003·Granted Jul 27, 2004·9 cites·1 claims
- 1451US2024290649A1Device for holding a wafer-shaped articleBRUGGER MICHAEL·Filed 2022·Application pending·0 cites
- 1548US9685358B2Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatusLAM RES AG·Filed 2016·Granted Jun 20, 2017·0 cites·20 claims
- 1648US8613288B2High temperature chuck and method of using sameBRUGGER MICHAEL·Filed 2009·Granted Dec 24, 2013·0 cites·10 claims
- 1748US2013233356A1Process and apparatus for treating surfaces of wafer-shaped articlesOBWEGER RAINER·Filed 2012·Application pending·0 cites
- 1845US2023360952A1Apparatus for processing a waferLAM RES AG·Filed 2021·Application pending·0 cites
- 1943US2024304489A1Apparatus for processing a wafer-shaped articleLAM RES AG·Filed 2022·Application pending·0 cites
- 2040US8974632B2Device and method for treating wafer-shaped articlesTSCHINDERLE ULRICH·Filed 2011·Granted Mar 10, 2015·0 cites·8 claims
- 2136US9887120B2Apparatus for treating surfaces of wafer-shaped articlesLAM RES AG·Filed 2015·Granted Feb 6, 2018·0 cites·14 claims
- 2235US9997379B2Method and apparatus for wafer wet processingKRAUS HARALD·Filed 2010·Granted Jun 12, 2018·0 cites·6 claims
- 2329US2018096879A1Spin chuck including edge ringLAM RES AG·Filed 2016·Application pending·0 cites
- 2428US2018040502A1Apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →