Inventor · disambiguated record

Ming-Hwu Cheng

Also filed as: CHENG MING-HWU

1 granted patent·5 citations·filing 2000–2000

25Inventor score

Technology areasG01N

Files withPREC INSTR DEV CT NAT SCIENCE1

Top patents by PatentIndex Score

1 record

0155US6493070B1Method for in-situ monitoring layer uniformity of sputter coating based on intensity distribution of plasma spectrumPREC INSTR DEV CT NAT SCIENCE·Filed 2000·Granted Dec 10, 2002·5 cites·13 claims

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