Inventor · disambiguated record
Michael J. Darwin
Also filed as: DARWIN MICHAEL · DARWIN MICHAEL J · DARWIN MICHAEL JOHN
9 granted patents·7 pending applications·162 citations·filing 2004–2023
87Inventor score
Top patents by PatentIndex Score
16 records- 0197US7324214B2Interferometer and method for measuring characteristics of optically unresolved surface featuresZYGO CORP·Filed 2006·Granted Jan 29, 2008·102 cites·56 claims
- 0294US7684049B2Interferometer and method for measuring characteristics of optically unresolved surface featuresZYGO CORP·Filed 2008·Granted Mar 23, 2010·18 cites·10 claims
- 0393US7948636B2Interferometer and method for measuring characteristics of optically unresolved surface featuresZYGO CORP·Filed 2010·Granted May 24, 2011·17 cites·39 claims
- 0484US7539583B2Method and system for defect detectionRUDOLPH TECHNOLOGIES INC·Filed 2005·Granted May 26, 2009·15 cites·19 claims
- 0578US9610653B2Method and apparatus for separation of workpieces and articles produced therebyELECTRO SCIENT IND INC·Filed 2013·Granted Apr 4, 2017·5 cites·42 claims
- 0664US8534135B2Local stress measurementJOHNSON TIMOTHY A·Filed 2011·Granted Sep 17, 2013·3 cites·38 claims
- 0757US2023296374A1Heterodyning optical phase measuring device for diffraction based overlayALLAGI INC·Filed 2023·Application pending·0 cites
- 0855US10627223B1Heterodyning optical phase measuring device for specular surfacesDARWIN MICHAEL JOHN·Filed 2019·Granted Apr 21, 2020·0 cites·20 claims
- 0954US8818754B2Thin films and surface topography measurement using reduced libraryKAMENEV BORIS V·Filed 2011·Granted Aug 26, 2014·2 cites·17 claims
- 1048US11193759B2Heterodyning optical phase measuring device for specular surfacesALLAGI INCORPORATED·Filed 2020·Granted Dec 7, 2021·0 cites·17 claims
- 1145US2014015170A1Method and apparatus for marking an articleELECTRO SCIENT IND INC·Filed 2013·Application pending·0 cites
- 1244US2015158116A1Method and apparatus for internally marking a substrate having a rough surfaceELECTRO SCIENT IND INC·Filed 2014·Application pending·0 cites
- 1336US2005098264A1Molecular airborne contaminants (MACs) film removal and wafer surface sustaining system and methodRUDOLPH TECHNOLOGIES INC·Filed 2004·Application pending·0 cites
- 1435US2019101489A1Method and Apparatus for Simultaneously Measuring 3Dimensional Structures and Spectral Content of Said StructuresDARWIN MICHAEL JOHN·Filed 2018·Application pending·0 cites
- 1534US2019101445A1Method and Apparatus for Hyperspectral ImagingDARWIN MICHAEL JOHN·Filed 2018·Application pending·0 cites
- 1632US2018293790A1Method and Apparatus for Measuring 3Dimensional StructuresDARWIN MICHAEL JOHN·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →