Inventor · disambiguated record

Mihaly Deak

Also filed as: DEAK IV MIHALY · DEAK MIHALY IV

1 granted patent·1 pending application·14 citations·filing 2004–2004

36Inventor score

Technology areasH10P

Files withAXCELIS TECH INC2

Top patents by PatentIndex Score

2 records

0158US7030395B2Workpiece support structure for an ion beam implanter featuring spherical sliding seal vacuum feedthroughAXCELIS TECH INC·Filed 2004·Granted Apr 18, 2006·14 cites·33 claims
0235US2005110292A1Ceramic end effector for micro circuit manufacturingAXCELIS TECH INC·Filed 2004·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →